Siemens Aktiengesellschaft

Albrecht Winnacker

Siegfried Birkle

Johann Kammermaier

Gerhard Schmidt

Gerhard Rittmayer

Rolf Schulte

Karl-Otto Dohnke

Eva-M Stich-Baumeister

Method for the plasma deposition of hydrogenated, amorphous carbon using

The invention provides electroactive passivation layers for semiconductor components comprising a thin layer of amorphous, hydrogenated carbon.

Amorphous, hydrogenated carbon electroactive passivation layer

A sensor for gases or ions with a light source, a detector and a sensor layer all of which are attached to a carrier. A thin sensor film, the absorptivity of which changes through the action of the measurement medium, is arranged on a light waveguide, the one flat side of which covers a flat end face of the light source, the end face of the carrier and a plane receiving surface of the detector. Thus, a sensitive sensor, especially for gases, is obtained in which the sensor layer, the light source and the detector form an integrated structural unit.

Sensor for gases or ions

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Erlangen, Germany

Albrecht Winnacker