Asml Netherlands B.v.

Signify Holding B.v.

Albertus Adrianus Smits

Erik Roelof Loopstra

Engelbertus Antonius Fransiscus Van Der Pasch

Wilhelmus Josephus Box

Ruud Antonius Catharina Maria Beerens

Peter Paul Steijaert

Emiel Jozef Eussen

Emiel Jozef Melanie Eussen

Hendrik Jan Eggink

Dmitri Anatolievich Chestakov

Ralph Theodorus Hubertus Maessen

The invention relates to a light emitting device, comprising at least one light source () and a closed container, the container comprising a first area () and a second area () that is arranged opposite to the first area (), the closed container being filled with a heat conducting fluid () that is thermally coupled to an inside surface of the closed container, wherein the at least one light source () is arranged on an outside surface () of the first area of the closed container and thermally coupled to the inside surface () of the closed container.

Light emitting device with heat conducting fluid

A lithographic apparatus is disclosed that includes an encoder type sensor system configured to measure a position of a substrate table of the lithographic apparatus relative to a reference structure. The encoder type sensor system includes an encoder sensor head and an encoder sensor target and the lithographic apparatus comprises a recess to accommodate the encoder sensor target.

Lithographic apparatus having an encoder type position sensor system

Lithographic apparatus having encoder type position sensor system

Lithographic apparatus having an encoder position sensor system

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Eindhoven, Netherlands

Albertus Adrianus Smits