Kla Corporation

Capres A/s

Alberto Cagliani

Ole Hansen

Dirch Hjorth Petersen

Frederik Westergaard Østerberg

Peter Folmer Nielsen

Frederik Westergaard Osterberg

Henrik Hartmann Henrichsen

Chia-Hung Wei

Frederik Westergaard ØSterberg

The multilayer test sample includes a stack with a bottom layer, a top layer, and a tunnel layer sandwiched between the bottom and top layers. The multilayer test sample has terminals below the stack for measuring on the stack. The terminals have unknown positions or distance between them. A model and a measurement strategy is defined so that material parameters of the stack may be determined.

Method for determining material parameters of a multilayer test sample

A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.

Probe for testing an electrical property of a test sample

The method may be used for measuring an electric property of a magnetic tunnel junction used in an embedded MRAM memory for example. The method uses a multi point probe with a plurality of probe tips for contacting a designated area of the test sample, which is electrically insulated from the part of the test sample which is to be tested. Electrically connections are placed underneath the magnetic tunnel junction and goes to the designated area.

Method for measuring an electric property of a test sample

The present invention relates to a method of establishing specific electrode positions by providing a multi-point probe and a test sample. The method comprises the measuring or determining of a distance between two of the electrodes of the multi-point probe and establishing a resistance model representative of the test sample. The method further comprises the performing of at least three different sheet resistance measurements and establishing for each of the different sheet resistance measurement a corresponding predicted sheet resistance based on the resistance model. Thereafter the method comprises the establishment of a set of differences constituting the difference between each of the predicted sheet resistance and its corresponding measured sheet resistance, and deriving the specific electrode positions of the multi-point probe on the surface of the test sample by using the distance and performing a data fit by minimizing an error function constituting the sum of the set of differences.

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Copenhagen, Denmark

Alberto Cagliani