Northern Telecom Limited

Albert R Boothroyd

Joseph P Ellul

Alexander Kalnitsky

Iain D Calder

Hussein M Naguib

Abdalla A Naem

An optical waveguide is made by forming a layer of SiO.sub.2 on a substrate and implanting a region of the SiO.sub.2 layer with Si ions to define a region containing a stoichiometric excess of Si which defines a region having an elevated refractive index surrounded by a region having a lower refractive index. The resulting optical waveguide is stable at the high temperatures required for many semiconductor processing methods, and is useful for optical interconnection in integrated optical and optoelectronic devices.

Optical waveguide and method for its manufacture

In a stacked metal-oxide-semiconductor (SMOS) transistor, the transistor source, drain and channel each have a lower part formed in a silicon substrate and an upper part composed of recrystallized polysilicon. The device gate is located between the upper and lower channel parts. By vertically integrating a MOS transistor, performance limitations imposed by the direct scaling approach to device miniaturization are avoided.

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Nepean, Canada

Albert R Boothroyd