Eaton Corporation

M/rad Corporation

Albert Paul Laber

Richard S Muka

Philip Marshall

Richard M Cloutier

Robert B Bramhall, Jr

Ugo Cauteruccio

A sealing arrangement for a vacuum processing system for semiconductor wafers which is effective to apply a sealing force to a valve element (66) between chambers of the processing system. The valve element is defined by a platen which holds wafers (30) for transfer between a horizontal receiving position within a staging chamber (14) to a vertical position within a processing chamber (16-19). The sealing arrangement includes a pair of toggle mechanisms (268) which are manually operable from outside the staging chamber and which, in conjunction with the closing force applied by the platen operating mechanism (165) are effective to maintain vacuum integrity within the staging chamber when the process chamber is at atmospheric pressure or removed for servicing.

Sealing apparatus for a vacuum processing system

A mechanical complex vibration tester is provided which is capable of simultaneously applying a plurality of discrete frequencies to a workpiece positioned on a test surface of the device to simulate random vibration testing. The vibrations may be varied in amplitude and they may be applied in either the vertical or the horizontal direction. Means are provided for isolating the tester from its environment in order to simulate vibration testing in inertial space.

Complex vibration tester

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Revere, MA, United States of America

Albert Paul Laber