Aerotech, Inc.

Albert P Ciez

Stephen J Botos

Brian L Favero

Gerald W McClain

A small footprint vertical lift and rotary positioning stage comprises a bottom wedge and a top wedge, a linear bearing between the bottom wedge and the top wedge, cam grooves and cam surfaces for constraining the motion of the top wedge in a vertical direction, a brushless linear motor for moving the bottom wedge back and forth along a horizontal path raising and lowering the top wedge, a circular table rotatably mounted on the top wedge and having a first cylindrical flange extending downward from a segment of the circumference of the circular table, a bracket mounted on the side of the top wedge, the bracket supporting an upwardly extending second cylindrical flange coaxial with the circular table and the first cylindrical flange, and a brushless curvilinear motor between the first and second cylindrical flanges.

Small footprint vertical lift and rotation stage

A low profile tilt stage comprises a planar base, a cradle defining a cylindrical surface having a cylindrical axis parallel to the base, a table mounted on the cradle by curvilinear bearings, a curvilinear direct drive brushless motor between the cradle and table, and an encoder reader fixed relative to the base and an encoder scale fixed to the table.

Direct drive tilt and goniometer stage

A linear motor driven positioning stage comprises a wedge positioned between a carrier and a base and a linear motor positioned between the wedge and the base for moving the wedge relative to the base along a second axis whereby the carrier moves relative to the base along a first axis.

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Murrysville, PA, United States of America

Albert P Ciez