Cymer, Inc.

Albert P Cefalo

Palash P Das

Holger Muenz

Vitaliy Shklover

David S Knowles

Systems and methods are disclosed for shaping a laser beam for interaction with a film in which the laser beam travels along a beam path and defines a short-axis and a long-axis. In one aspect, the system may include a first short-axis element having an edge positioned at a distance, d, along the beam path from the film and a second short-axis element having an edge positioned at a distance, d, along the beam path from the film, with d&#x3c;d. An optic may be positioned along the beam path between the second element and the film for focusing the beam in the short-axis for interaction with the film. In another aspect, a system may be provided having a mechanism operative to selectively adjust the curvature of one or both of the edges of the short-axis element.

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San Diego, CA, United States of America

Albert P Cefalo