Lucent Technologies Inc.

At+t Corp.

American Telephone & Telegraph Co., At&t Bell Laboratories

Other

At&t Bell Laboratories

Bell Telephone Laboratories

At&t Ipm Corp.

Albert Lee Hutchinson

Federico Capasso

Alfred Yi Cho

Deborah Lee Sivco

Claire F Gmachl

Jerome Faist

Alessandro Tredicucci

Carlo Sirtori

James Nelson Baillargeon

Arthur Mike Sergent

Sung-Nee George Chu

Gaetano Scamarcio

Roberto Paiella

Won-Tien Tsang

Ralph A Logan

Barry Franklin Levine

Arthur C Gossard

Michael C Wanke

Clyde G Bethea

Serge Luryi

Harold Yoonsung Hwang

Mariano Troccoli

Harry Tapley French

Raffaele Colombelli

Richard A Kiehl

George Sung-Nee Chu

Khalid Mohammed

Sustana Sen

The measurement of intersubband electroluminescence (ISB-EL) in unipolar quantum cascade lasers is achieved by forming a longitudinal cleave through the active region and waveguide of the QC laser device, exposing a complete side face of the device, including the active region. The conventional laser facets at the entrance and exit of the active region are coated with a highly reflective material and the emission from the exposed side face is measured. In theory, the sideface emission would comprise only the ISB-EL spontaneous emission, but some additional laser emission (due to scattering in the imperfect waveguide structure) also exits along this sideface. Spatial filtering and/or polarization monitoring can be used to differentiate the laser emission from the ISB-EL spontaneous emission.

Technique for measuring intersubband electroluminescence in a quantum cascade laser

An optical gain medium has first and second active layers and an injector layer interposed between the first and second active layers. The active layers have upper minibands and lower minibands. The injector layer has a miniband that transports charge carriers from the lower miniband of the first active layer to an excited state in the upper miniband of the second active layer in response to application of a voltage across the optical gain medium.

Quantum cascade laser with relaxation-stabilized injection

A self-mode-locking (SML) mid-infrared (5 and 8 &mgr;m) quantum cascade laser is formed that comprises both a relatively thin dielectric insulating layer (i.e., less than one-half micron in thickness) overlaid with an optically highly lossy (i.e., absorbing) layer, with a relatively long (approximately 3.5 mm) optical waveguide. Evidence of mode-locking is obtained from the measured optical spectra and corresponding interferograms, as well as from the rf spectra of the photocurrent detected with a fast quantum-well infrared photodetector. An estimate for the pulse width of approximately 3 psec is inferred from these data.

Self-mode-locking quantum cascade laser

The RT regions of an ISB light emitter comprise pre-biased SLs and a multiplicity of split quantum wells (SPQWs). A SPQW is a quantum well that is divided into a multiplicity of sub-wells by a first barrier layer sufficiently thin that the upper and lower energy states are split beyond their natural broadening and contribute to different minibands in each RT region. In contrast, adjacent SPQWs are coupled to one another by second barrier layers. The thicknesses of the latter layers are chosen so that minibands are created across each RT region. In one embodiment, the emitter includes an I/R region between adjacent RT regions, and in another embodiment the I/R regions are omitted.

Flat minibands with spatially symmetric wavefunctions in intersubband superlattice light emitters

A surface plasmon laser structure is formed to include a DFB structure as the metal carrying layer, thus forming a single mode surface plasmon laser. The DFB structure comprises a multiple layer metallic surface guiding structure (for example, titanium stripes covered with a layer of gold. forming alternating Ti/Au&mdash;Au stripes). The active region, in one embodiment, may comprise a quantum cascade structure.

Distributed feedback surface plasmon laser

In a mesa geometry semiconductor laser, a patterned dielectric coating used to define the stripe geometry contact on the top the mesa and to provide significant waveguiding comprises a chalcogenide glass. Applications to intersubband (e.g., quantum cascade) lasers are specifically described.

Mesa geometry semiconductor light emitter having chalcogenide dielectric coating

A mounting technology that increases the cw operating temperature of intersubband lasers, without increasing the risk of hot spots near the facets and short circuits near the perimeter of the laser chip, is described. In accordance with one embodiment of our invention, a method of fabricating a intersubband semiconductor laser comprises the steps of providing a single crystal semiconductor substrate, forming on the substrate an epitaxial region that includes a core region and an intersubband active region in the core region, forming front and back facets that define an optical cavity resonator, forming a metal electrode on the epitaxial region so as to provide an electrical connection to said active region, and mounting said laser on a heat sink, characterized in that the mounting step includes the steps of (i) soldering the electrode to the heat sink so that the front facet overhangs an edge of the heat sink and (ii) cleaving off the overhanging portion of the laser so as to form a new front facet that is essentially flush with the edge of said heat sink. In accordance with another embodiment, our invention is further characterized in that metal electrode to the epitaxial region is recessed from the edges of the laser chip. In accordance with yet another embodiment, our invention is further characterized in that the back facet of the laser is coated so that any solder that might tend to creep onto the back facet contacts the coating and not semiconductor material (in particular the ends of the active region).

Mounting technology for intersubband light emitters

An intersubband semiconductor light source comprises a core region that includes a unipolar, radiative transition (RT) region having upper and lower energy levels, an injector-only (I) region disposed on one side of the RT region, and a reflector/extractor-only (R/E) region disposed on the other side of the RT region. The I region has a first miniband of energy levels aligned so as to inject electrons into the upper energy level, and the R/E region has a second miniband of energy levels aligned so as to extract electrons from the lower energy level. The R/E region also has a minigap aligned so as to inhibit the extraction of electrons from the upper level. A suitable voltage applied across the core region is effective to cause the RT region to generate light at a wavelength determined by the energy difference between the upper and lower energy levels. Low voltage operation at less than 3 V is described.

Intersubband light source with separate electron injector and reflector/extractor

A long wavelength (e.g., mid-IR to far-IR) semiconductor laser comprises an active region and at least one cladding region characterized in that the cladding region includes a light guiding interface between two materials which have dielectric constants opposite in sign. Consequently, the guided modes are transverse magnetic polarized surface waves (i.e., surface plasmons) which propagate along the interface without the need for a traditional dielectric cladding. In a preferred embodiment, the interface is formed between a semiconductor layer and a metal layer. The complex refractive index of the metal layer preferably has an imaginary component which is much larger than its real component. In an illustrative embodiment, our laser includes a QC active region sandwiched between a pair of cladding regions one of which is a guiding interface based on surface plasmons and the other of which is a dielectric (e.g., semiconductor) structure.

Long wavelength semiconductor lasers incorporating waveguides based on surface plasmons

A bi-directional semiconductor light source is formed that provides emission in response to either a positive or negative bias voltage. In a preferred embodiment with an asymmetric injector region in a cascade structure, the device will emit at a first wavelength (&lgr;,) under a negative bias and a second wavelength (&lgr;,) under a positive bias. In other embodiments, the utilization of an asymmetric injector region can be used to provide a light source with two different power levels, or operating voltages, as a function of the bias polarity.

Bi-directional unipolar semiconductor light source

A multiple wavelength quantum cascade (QC) superlattice (SL) light source has at least three energy levels in each radiative transition (RT) region, and electron transitions between the levels give rise to emission lines at different wavelengths. In one embodiment, a lower miniband has at least a first energy level and an upper miniband has at least third and fourth energy levels. In another embodiment, the lower miniband has first and second energy levels. In both cases, electron transitions between a first pair of the upper and lower levels generates light at a first spontaneous emission line having a center wavelength .lambda..sub.1 and a line broadening first energy, and electron transitions between a second pair of the upper and lower levels generates light at a second spontaneous emission line having a center wavelength .lambda..sub.2 and a line broadening second energy. The energy separation of the center wavelengths is greater than the larger of the first and second line broadening energies, and means are provided for inhibiting the relaxation of electrons from the fourth level to said third level. In a preferred embodiment, which is particularly suited to lasers made from Group III-V compound semiconductors, the inhibiting means hinders the emission of optical phonons. One way to inhibit these phonons is to make the energy separation of the upper levels less than the energy of an optical phonon in the active region.

Multiple wavelength quantum cascade light source

The quantum cascade (QC) photon source according to this invention can emit simultaneously at two distinct wavelengths, typically both in the mid-infrared. This is accomplished through provision of a semiconductor layer structure in which, at the proper bias voltage, electrons are injected into an energy level E.sub.3 and then forced to cascade through an intermediate level E.sub.2 before reaching the ground state E.sub.1 of the active region. In the process, photons of energy E.sub.3 -E.sub.2 (wavelength .lambda..sub.1) and E.sub.2 -E.sub.1 (wavelength .lambda..sub.2) are emitted. Dual wavelength photon sources according to this invention can be used in a variety of ways, e.g., to determine the absorption of a gaseous sample at wavelengths .lambda..sub.1 and .lambda..sub.2, exemplarily to determine the concentration of a particular chemical compound in the sample.

Article comprising a dual-wavelength quantum cascade photon source

A novel quantum cascade (QC) laser comprises a multiplicity of identical repeat units, with each repeat unit comprising an active region and an injector region. The injector region comprises quantum wells and barriers, selected to facilitate, under appropriate bias, resonant carrier transport from a lower energy level of a given active region to an upper energy level of an adjacent downstream active region. Carrier transition from the upper energy level to a lower energy level of an active region results in emission of infrared radiation. The laser is advantageously used in, e.g., a measurement system for detection of trace compounds in air.

Quantum cascade laser

A novel superlattice quantum cascade (SLQC) laser has undoped SL active regions, with the dopant concentration in the injector region being selected, such that, under an appropriate electrical bias, the SL active region is substantially electric field free. The absence of dopant atoms in the SL active region results in reduced carrier scattering and reduced optical losses, with consequent low threshold current and/or room temperature operation. The novel laser emits in the mid-IR spectral region and can be advantageously used in measurement or monitoring systems, e.g., in pollution monitoring systems.

Article comprising an improved superlattice quantum cascade laser

Instead of trying to keep the SLs of a QC laser field free, we 'pre-bias' the actual electronic potential by varying the SL period (and hence average composition) so as to achieve an essentially flat profile, on average, of upper and lower minibands, despite the presence of an applied field in the SLs. In one embodiment, in at least a first subset of the QW layers, the thicknesses of the QW layers are varied from QW layer to QW layer so as to increase in the direction of the applied field. In this embodiment, the upper and lower lasing levels are located, in the absence of an applied electric field, each at different energies from layer to layer within the first subset, so that despite the presence of an applied field, the desired flatband condition of the upper and lower minibands is realized. In a preferred embodiment, the thicknesses of the QW layers within the first subset are varied from QW layer to QW layer so as to increase in the direction of the applied field, and the thicknesses of a second subset of the barrier layers are also varied from barrier layer to barrier layer so as to decrease or increase in the direction of the applied field.

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Piscataway, NJ, United States of America

Albert Lee Hutchinson