Materion Advanced Materials Germany Gmbh

Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Heraeus Deutschland Gmbh & Co Kg

Albert Kastner

Martin Schlott

Christoph Simons

Uwe Konietzka

Markus Schultheis

Bernd Szyszka

Jens Wagner

Sabine Schneider-Betz

Volker Sittinger

Ben Kahle

Wilma Dewald

The present invention relates to a sputtering target, comprising a silver alloy comprising

Silver alloy-based sputter target

A double-layer system includes a metal layer facing away from a viewer and a coating facing the viewer. In order to make the layer system production process as simple as possible and to provide a sputter deposition method that dispenses entirely with the use of reactive gases in the sputtering atmosphere or requires only a small amount thereof, the coating is in the form of an optically partially absorbing layer which has an absorption coefficient kappa of less than 0.7 at a wavelength of 550 nm and a thickness ranging from 30 to 55 nm.

Double-layer system comprising a partially absorbing layer, and method and sputter target for producing said layer

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Hanau, Germany

Albert Kastner