Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Albert Dekker

Anton Adriaan Bijnagte

Hamed Sadeghian Marnani

Geerten Frans Ijsbrand Kramer

Teunis Cornelis Van Den Dool

William Edward Crowcombe

Jasper Winters

Roelof Willem Herfst

Jan Jacobus Benjamin Biemond

Martinus Cornelius Johannes Maria Van Riel

Rik Kruidhof

Evert Nieuwkoop

Peter Martijn Toet

Aukje Arianne Annette Kastelijn

Aukje Arianne Annette Kastelijin

Marinus Cornelius Johannes Maria Van Riel

The present document relates to a probe chip for use in a scanning probe microscopy device for holding a probe mounted thereon. The probe chip includes a carrier element having a probe bearing side which is configured for bearing the probe to be extending therefrom as an integral or mounted part thereof. The carrier element further comprises a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device, wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat. The carrier element towards the probe bearing side thereof is truncated in the lateral direction on either side of a longitudinal axis through a center of the carrier element, such as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface.

Probe chip, scan head, scanning probe microscopy device and use of a probe chip

This document relates to a probe for use in a scanning probe microscopy device. The probe comprises a cantilever and a probe tip being located at a first end section of the cantilever. The cantilever is configured for bending in a Z-direction perpendicular to a surface of a substrate in use. The cantilever comprises a neck section and a paddle section, and the probe tip is located on the paddle section. The neck section has a width and height in cross section thereof, comprises a base part having a rectangular cross section. The cantilever at least across a length of the neck section comprises a ridge extending in a direction away from the base part. The base part and the ridge together define the width and height of the neck section, and have dimensions such that a vertical bending stiffness of the cantilever for bending in the Z-direction matches a lateral stiffness of the cantilever with respect to forces acting on the probe tip in a direction transverse to the Z-direction. The document further describes a manufacturing method.

Probe, method of manufacturing a probe and scanning probe microscopy system

The invention is directed at a method of positioning a carrier on a flat surface using an positioning member, wherein the carrier comprises an upper part and a base which are connected to each other such as to be arranged remote from each other, wherein the positioning member is arranged between the base and the upper part such that the base is located at an opposite side of the positioning member with respect to the upper part of the carrier, the upper part resting on the positioning member prior to placing of the carrier onto the flat surface, wherein the upper part comprises three engagement elements, and wherein the positioning member comprises a support surface for receiving the three engagement elements of the upper part, said support surface including a plurality of sockets forming a kinematic mount for said three engagement elements, wherein the base comprises three landing elements, each landing element being associated with a respective one of the three engagement elements, and the method comprising the steps of: operating the positioning member for moving the carrier relative to the flat surface in a direction parallel thereto such as to position the carrier above a landing position; performing an action of placing the carrier on the flat surface at the landing position, said action of placing comprising: moving the base towards the flat surface until at least one of said landing elements is in contact with the flat surface and an associated engagement element of said engagement elements is released from the kinematic mount; continue said moving of the base relative to the flat surface until all landing elements are in contact with the flat surface; and continue said action of placing the carrier until all engagement elements are released from the kinematic mount.

Method of positioning a carrier on a flat surface, and assembly of a carrier and a positioning member

A high-precision linear actuator is described that includes a first straight-guide mechanism that guides movements of an actuator element and a working device relative to an actuator housing. A pressing mechanism that, in a pressing-contact condition, presses the actuator frame and the actuator housing with a predetermined force against one another. A second straight-guide mechanism that guides movements of the actuator housing relative to the actuator frame between the pressing-contact condition and released-contact conditions in which the pressing mechanism presses the actuator frame and the actuator housing towards one another. The high-precision linear actuator provides a safety mechanism automatically reinstates negative consequences of unforeseen collisions in the working environment. In addition the high-precision linear actuator allows for a compact and light-weight design of the actuator element and the working device, which improves operational speed and effectivity of the linear actuator.

High-precision linear actuator

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample

The present document relates to a Z-position motion stage for use in a scanning probe microscopy system. The stage comprises a support element for mounting the z-position motion stage on a scan head, and at least one first actuator mounted on the support element for enabling motion of a probe of the scanning probe microscopy system. The probe is connected to or attachable to the z-position motion stage. The support element and the at least one first actuator are shaped and mounted such as to form a rotation symmetric element which is rotation symmetric around a notional common longitudinal axis. The document further relates to a scan head, a method of manufacturing a z-position motion stage, and a Z-position motion stage obtained with such a method.

Z-position motion stage for use in a scanning probe microscopy system, scan head and method of manufacturing

A high-precision scanning device () comprises a first linear scanner () for providing scanning movements along a first linear scanning axis (). The first linear scanner comprises a first base frame (), a first scanning frame (), two mutually parallel first piezoelectric bending plates (A,B), and two first hinge joints (A,B) having two first hinge axes (A,B), respectively. Under influence of synchronic piezoelectric operation of the two first piezoelectric bending plates, the first scanning frame is being synchronically moved relative to the first base frame along said first linear scanning axis. The scanning device is compact, especially nearby the working areas where the precise scanning movements have to be performed, so that the device can be operable in very tiny working areas.

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Delft, Netherlands

Albert Dekker