Taiwan Semiconductor Manufacturing Comp. Ltd.

Alan Yang

Jiun-Rong Pai

Hsu-Shui Liu

Yang-Ann Chu

Tsung-Sheng Kuo

Vic Huang

Yung-Lin Hsu

Chiung-Min Lin

Richard Lin

An apparatus for handling wafer carriers in a semiconductor fabrication facility (FAB) is disclosed. In one example, the apparatus includes: a table configured to receive a wafer carrier having a first door and operable to hold a plurality of wafers; an opening mechanism configured to open the first door of the wafer carrier; and a door storage space configured to store the first door. The apparatus may be either located on a floor of the FAB or physically coupled to a ceiling of the FAB.

Apparatus and method for handling wafer carrier doors

In an embodiment an automated material handling system (AMHS) for a semiconductor fabrication facility (FAB) includes: a sensor supported by a rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the rail, wherein the vehicle is configured to carry at least one wafer; and a monitoring module configured to: detect a trigger event based on the sensor data, and initiate a remediation action in response to the trigger event.

Systems and methods for sensory automated material handing

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Hsin-Chu, Taiwan

Alan Yang