Taiwan Semiconductor Manufacturing Comp. Ltd.

Alan Tu

Li-Jui Chen

Chung-Liang Cheng

Po-Chung Cheng

Tzung-Chi Fu

Chun-Lin Louis Chang

Bo-Tsun Liu

Han-Lung Chang

Chin-Szu Lee

Cheng-Yi Wu

Li-Hsuan Chu

Ethan Hsiao

C W Chiu

Chih-Wei Hsieh

Hong-Ying Lin

Hui-Lin Sung

Sz-Yuan Hung

Sheng-Yung Lo

Henry Tong Yee Shian

Henry Tong Yee-Shian

The present disclosure provides a method for aligning a master oscillator power amplifier (MOPA) system. The method includes ramping up a pumping power input into a laser amplifier chain of the MOPA system until the pumping power input reaches an operational pumping power input level; adjusting a seed laser power output of a seed laser of the MOPA system until the seed laser power output is at a first level below an operational seed laser power output level; and performing a first optical alignment process to the MOPA system while the pumping power input is at the operational pumping power input level, the seed laser power output is at the first level, and the MOPA system reaches a steady operational thermal state.

Methods and systems for aligning master oscillator power amplifier systems

A semiconductor device includes: a fin structure disposed on a substrate; a gate feature that traverses the fin structure to overlay a central portion of the fin structure; a pair of source/drain features, along the fin structure, that are disposed at respective sides of the gate feature; and a plurality of contact structures that are formed of tungsten, wherein a gate electrode of the gate feature and the pair of source/drain features are each directly coupled to a respective one of the plurality of contact structures.

Contact structure

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Hsinchu, Taiwan

Alan Tu