Atlantic Inertial Systems, Inc.

British Aerospace Public Limited Company

British Aerospace Plc

Bae Systems, Inc.

Alan R Malvern

Kiran Harish

Kevin Townsend

Christopher Paul Fell

Louise Snell

Ian David Hopkin

Andrew Kazer

Nicholas R Wilkinson

Mark Alcuin Venables

Richard H W Reilly

Nicolass F DeRooij

Nicolaas F Derooij

Thomas Allsop

Ronald Neal

Steven Westbury

Barry V Isaacs

Nicholas Wilkinson

A capacitive accelerometer includes a proof mass, first and second fixed capacitive electrodes, and a DC biasing element arranged to apply a DC voltage (V) to the proof mass based on a threshold acceleration value. A first closed loop circuit is arranged to detect a signal resulting from displacement of the proof mass and control the pulse width modulation signal generator to apply the first and second drive signals V, Vwith a variable mark:space ratio. A second closed loop circuit keeps the mark:space ratio constant and to change the magnitude, V, of the DC voltage applied to the proof mass by the DC biasing element so as to provide a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintaining the proof mass at a null position, when the applied acceleration is greater than a threshold acceleration value.

Methods for closed loop operation of capacitive accelerometers

A sensor package comprising: a sensor, wherein the sensor comprises a sensing structure formed in a material layer and one or more further material layers arranged to seal the sensing structure to form a hermetically sealed sensor unit; a support structure; one or more springs flexibly fixing the hermetically sealed sensor unit to the support structure; wherein the one or more springs are formed in the same material layer as the sensing structure of the sensor unit; and one or more external package wall(s) encapsulating the sensor unit, the support structure, and the one or more springs, wherein the support structure is fixed to at least one of the package wall(s). The springs decouple mechanical stresses between the sensor unit and the external package wall(s) so as to reduce the long term drift of scale factor and bias.

Sensor packages

An angular velocity sensor comprises: an insulative support layer (); a substrate layer () formed of a silica-based material and comprising a planar ring structure () mounted to vibrate in-plane; and a plurality of conductive electrodes (), each comprising a first set of moveable conductive electrode tracks () formed on a surface of the planar ring and a second set of fixed conductive electrode tracks () formed on a surface of the insulative support layer axially spaced from the surface of the planar ring. The first and second sets of conductive electrode tracks are interdigitated with a lateral spacing between them in a radial direction. Each moveable conductive electrode track has a radial offset from a median line between adjacent fixed conductive electrode tracks such that each moveable conductive electrode track has a different lateral spacing from two different adjacent fixed conductive electrode tracks in opposite radial directions.

Angular velocity sensors

A navigation system comprising: an inertial navigation system arranged to output a first position estimate; a terrain based navigation unit arranged to output a second position estimate; a gravity based navigation unit arranged to output a third position estimate; a stored gravity map arranged to receive a position and to output gravity information for that position; and an iterative algorithm unit arranged to determine an INS error state in each iteration; wherein in each iteration the iterative algorithm unit is arranged to: receive the first position estimate, the second position estimate, and the third position estimate; determine a gravity corrected position estimate based on the first position estimate, the INS error state and the gravity information; and update the INS error state for the next iteration based on the INS error state, the gravity corrected position estimate, the second position estimate and the third position estimate.

Navigation system

An accelerometer closed loop control system comprising: a capacitive accelerometer comprising a proof mass moveable relative to first and second fixed capacitor electrodes; a PWM generator to generate in-phase and anti-phase PWM drive signals with an adjustable mark/space ratio, wherein said drive signals are applied to the first and second electrodes such that they are charged alternately; an output signal detector to detect a pick-off signal from the accelerometer representing a displacement of the proof mass from a null position to provide an error signal, wherein the null position is the position of the proof mass relative to the fixed electrodes when no acceleration is applied; a PWM servo operating in closed loop to vary the mark/space ratio of said PWM drive signals in response to the error signal so that mechanical inertial forces are balanced by electrostatic forces.

Accelerometer control

A sensing structure for an accelerometer includes a support and a proof mass mounted thereto by flexible legs. The proof mass has moveable electrode fingers perpendicular to the sensing direction and at least four fixed capacitor electrodes, with fixed capacitor electrode fingers perpendicular to the sensing direction. The fixed capacitor electrode fingers interdigitate with the movable electrode fingers and the proof mass is mounted to the support by an anchor on a centre line of the proof mass. The proof mass has an outer frame surrounding the fixed capacitor electrodes and the flexible legs extend laterally inwardly from the proof mass to the anchor. The fixed capacitor electrodes comprise two inner electrodes, one on each side of the proof mass centre line, and two outer electrodes, one on each side of the proof mass centre line.

Accelerometer

A capacitive accelerometer comprises: a substantially planar proof mass mounted to a fixed substrate by flexible support legs so as to be linearly moveable in an in-plane sensing direction. The proof mass comprises first and second sets of moveable capacitive electrode fingers. First and second sets of fixed capacitive electrode fingers interdigitates with the first and second sets of moveable electrode fingers respectively. A set of moveable damping fingers extend from the proof mass substantially perpendicular to the sensing direction, laterally spaced in the sensing direction. A set of fixed damping fingers mounted to the fixed substrate interdigitates with the set of moveable damping fingers and comprises an electrical connection to the proof mass so that the interdigitated damping fingers are electrically common. The damping fingers are mounted in a gaseous medium that provides a damping effect.

Accelerometers

A sensing structure for an accelerometer includes a support and a proof mass mounted to the support by flexible legs for in-plane movement in response to an applied acceleration along a sensing direction. The proof mass includes a plurality of moveable electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction. The structure also includes at least one pair of fixed capacitor electrodes comprising first and second sets of fixed electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction; the first set of fixed electrode fingers arranged to interdigitate with the moveable electrode fingers with a first offset in one direction from a median line therebetween, and the second set of fixed electrode fingers arranged to interdigitate with the moveable electrode fingers with a second offset in the opposite direction from a median line therebetween.

A capacitive accelerometer including: at least one additional fixed capacitor electrode with a plurality of additional fixed capacitive electrode fingers extending along the sensing direction. The proof mass comprises a plurality of moveable capacitive electrode fingers extending from the proof mass along the sensing direction and arranged to interdigitate with the plurality of additional fixed capacitive electrode fingers of the at least one additional fixed capacitor electrode. A means is provided for applying a voltage to the at least one additional fixed capacitor electrode to apply an electrostatic force to the plurality of moveable capacitive electrode fingers that acts to pull the proof mass towards the at least one further fixed capacitor electrode and thereby reduces the lateral spacings between the movable capacitive electrode fingers of the proof mass and the first and second sets of fixed capacitive electrode fingers that provide electrostatic forces for sensing purposes.

A closed loop method of controlling a capacitive accelerometer uses two servo loops. A Vcrit servo loop uses an output signal (S) modulated by a sine wave signal (S). The Vcrit control signal adjusts the magnitude of the PWM drive signals applied to the fixed capacitor electrodes of the accelerometer, thereby optimising open loop gain.

An inertial sensor includes a substantially planar, rotationally symmetric proof mass, a capacitive pick-off circuit connected to the proof mass, an electrical drive circuit connected to the four pairs of electrodes. The drive circuit is arranged to apply first in-phase and anti-phase pulse width modulation (PWM) drive signals with a first frequency to the first and third electrode pairs, such that one electrode in each pair is provided with in-phase PWM drive signals and the other electrode in each pair is provided with anti-phase PWM drive signals and to apply second in-phase and anti-phase PWM drive signals with a second frequency, different to the first frequency, to the second and fourth electrode pairs, such that one electrode in each pair is provided with in-phase PWM drive signals and the other electrode in each pair is provided with anti-phase PWM drive signals.

Inertial sensors

An accelerometer comprises a support, a first mass element and a second mass element, the mass elements being rigidly interconnected to form a unitary movable proof mass, the support being located at least in part between the first and second mass elements, a plurality of mounting legs securing the mass elements to the support member, at least two groups of movable capacitor fingers provided on the first mass element and interdigitated with corresponding groups of fixed capacitor fingers associated with the support, and at least two groups of movable capacitor fingers provided on the second mass element and interdigitated with corresponding groups of fixed capacitor fingers associated with the support.

An accelerometer comprises a support (), a proof mass () supported for movement relative to the support () by a plurality of mounting legs (), a plurality of fixed capacitor fingers associated with the support () and a plurality of movable capacitor fingers associated with the proof mass (), the fixed capacitor fingers being interdigitated with the movable capacitor fingers, the mounting legs () being of serpentine shape, each mounting leg () comprising at least a first generally straight section (), a second generally straight section (), and an end section () of generally U-shaped form interconnecting the first and second generally straight sections (), wherein the thickness Te of the end section () is greater than the thickness Tc of a central part () of both of the first and second generally straight sections ().

Variable capacitance accelerometer with meandering flexures

An accelerometer open loop control system comprising a variable capacitance accelerometer having a proof mass movable between fixed capacitor plates, drive signals applied to the capacitor plates, a charge amplifier amplifying an accelerometer output signal representing applied acceleration, and an autoranging facility for monitoring the output signal, and for adjusting the drive signals in dependence on the output signal in order to restrict the amplitude of the accelerometer output signal, thus maintaining sensitivity of the accelerometer while permitting response to a wide range of g values. Corrections are applied by means of look up tables to compensate for inaccuracies arising from movement of the proof mass and temperature variations.

Accelerometer control systems

An angular velocity sensor or gyroscope has a ring and a primary drive transducer arranged to cause the ring to oscillate in a primary mode substantially at the resonant frequency of the primary mode of the ring. A primary control loop receives primary pick-off signals from the primary pick-off transducer and provides primary drive signals to the primary drive transducer so as to maintain resonant oscillation of the ring. The primary control loop includes a demodulator arranged to determine the amplitude of the fundamental frequency of the primary pick-off signals and a demodulator arranged to determine the amplitude of the second harmonic frequency of the primary pick-off signals and a drive signal generator arranged to produce the primary drive signals with an amplitude that is dependent on a ratio of the amplitude of the second harmonic frequency of the primary pick-off signal over the amplitude of the fundamental frequency of the primary pick-off signal as derived by a divider.

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Plymouth, United Kingdom

Alan R Malvern