Center for Advanced Fiberoptic Applications

Galileo Electro-optics Corporation

Robert J. Soave

G. William Tasker

Alan M. Then

Steven M. Shank

Scott T. Bentley

Alan M Then

G William Tasker

Robert J Soave

Steven M Shank

Anthony S Bauco

Gregory L Snider

Scott T Bentley

A method for manufacturing a discrete dynode electron multiplier includes employing micromachining and thin film techniques to produce tapered apertures in an etchable substrate, bonding the substrates together and activating the internal surfaces of the etched substrate using chemical vapor deposition or oxidizing and nitriding techniques.

Method for fabrication of discrete dynode electron multipliers

The present invention discloses a method for constructing a completely micromachined MCP that is activated with thin-film dynodes wherein the interchannel regions are first dry etched in the substrate, resulting in channel pillars. The etched portions of the substrate are then back filled and the channel pillars are thereafter removed to produce a micromachined perforated microchannel plate. The technique may be employed to produce an active element for an integrated image tube or photomultiplier tube.

Method for fabrication of microchannel electron multipliers

A micromachined electron multiplier is disclosed wherein a substrate has at least one trench formed therein and an aperture cover is disposed on the substrate with at least one inlet aperture aligned with one end of the channel. Either the substrate or the apertured cover may have an outlet aperture formed therein. A variety of channel shapes, and arrays are disclosed as well as a solid state photomultiplier tube formed with an integrated radiation window and anode structure.

Micro-fabricated electron multipliers

Manufacture of a microchannel plate may be improved using photoelectrochemical etching and thin film activation such as CVD and nitriding and oxidizing wall surface portions of pores formed in the substrate. The pore pattern may be changed by oxidizing and etching the substrate prior to activation.

Fabrication of a microchannel plate from a perforated silicon

The invention employs a reverse biased zener diode in the output circuit of a single stage or multistage electron multiplier. In a multistage device, a bypass resistor is employed between stages for increasing the bias current in downstream stages which operates at reduced potential whereby power dissipation is minimized.

Growing community of inventors

Auburn, MA, United States of America

Alan M Then