Applied Materials, Inc.

Alan J Wickstrom

Paul C Allen

Bryan Conrad Bolt

A multiple beam generator for use in a scanning system, wherein the generator includes an acousto-optic deflector (AOD) which during use receives a laser beam and generates a deflected beam, the deflection of which is determined by an AOD control signal; a diffractive element which generates an array of input beams from the deflected beam; and a control circuit which during operation generates the AOD control signal and varies a characteristic of the first control signal to account for errors in the scanning system.

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Beaverton, OR, United States of America

Alan J Wickstrom