Texas Instruments Corporation

Alan J Wegleitner

Adolphus E McClanahan

Daniel A Fresquez

Gregory Rodenroth

Milan Chiploonkar

Mark Damone Gillette

A method of checking a seal of a probe chamber or test chamber (thermal chamber) during a freezing temperature chamber condition. The thermal chamber provided includes a probe card or a contactor for electrically testing a semiconductor device under test (DUT), a gas inlet, a chiller which provides a freezing chamber temperature, and a pressure sensor for sensing a pressure in the thermal chamber (chamber pressure). Using the pressure sensor, the chamber pressure is sensed while flowing a dry gas through the gas inlet sufficient to render the chamber pressure a positive pressure. The positive pressure is compared to a reference pressure, and from the comparing it is determined whether the thermal chamber is properly sealed.

Seal monitor for probe or test chamber

A software system is provided that tracks employee and contractor operation/certification of fabrication equipment and processes is provided to ensure that only qualified personnel are allowed to process the materials. The system is real time with an auto-update features, Web enabled, dynamic tool interface with automatic record checking and reporting.

Growing community of inventors

Prosper, TX, United States of America

Alan J Wegleitner