Fei Comapny

Alan Frank De Jong

Johannes Jacobus Lambertus Mulders

Peter Christiaan Tiemeijer

Uwe Luecken

Alexander Henstra

Frank Jeroen Pieter Schuurmans

Bart Buijsse

Milos Toth

Pleun Dona

Cornelis Sander Kooijman

Tomás Vystavel

Richard J Young

Faysal Boughorbel

Eric Gerardus Theodoor Bosch

Hendrik Nicolaas Slingerland

Pavel Stejskal

Wilhelmus Mathijs Marie Kessels

Jacob Simon Faber

Berend Helmerus Lich

Gerrit Cornelis Van Hoften

Marek Uncovský

Raymond Wagner

Gerard Anne Nicolaas Van Veen

Jacobus Peter Johannes Peters

Carmen Francisca Maria Van Vilsteren

Adriaan Jacobus Martinus Mackus

Bernardus Jacobus Marie Bormans

Peter Emile Stephan Joseph Asselbergs

Pierre Bleuet

Johannes Mulders

Karel Diederick Van Der Mast

A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.

Arrangement for X-Ray tomography

A micro-reactor is provided for observing small particles, cells, bacteria, viruses or protein molecules in a fluid. The micro-reactor includes a first channel for containing the fluid and a second channel adjacent to the first channel. A gap connects the first channel and the second channel and a window transparent to the method of inspection is provided at the gap. A static or dynamic gradient, such as a gradient in concentration of a chemical or biological material, in pressure, in temperature, in electric potential, or in magnetic field, is applied across the gap, thereby causing the particles to cross the gap. By detecting a property of the particles upstream in the first channel and then applying a pressure burst over the channels when the property meets certain pre-set criteria, only selected particles can be placed in the gap.

Micro-reactor for observing particles in a fluid

The invention relates to a method for correcting distortions introduced by the projection system () of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain. To this end the invention discloses a detector equipped with multipoles (), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen () for detecting the electrons.

Method of use for a multipole detector for a transmission electron microscope

Electron-beam-induced chemical reactions with precursor gases are controlled by adsorbate depletion control. Adsorbate depletion can be controlled by controlling the beam current, preferably by rapidly blanking the beam, and by cooling the substrate. The beam preferably has a low energy to reduce the interaction volume. By controlling the depletion and the interaction volume, a user has the ability to produce precise shapes.

Charged particle beam processing

A method for forming microscopic 3D structures. In the method according to the invention a substrate () is placed in a Scanning Electron Microscope (SEM). The SEM is equipped with a Gas Injection System (GIS) () for directing a jet of precursor fluid to the substrate. The substrate is cooled below the freezing point of the precursor gas so that a frozen layer of the precursor gas can be applied to the substrate. By now repeatedly applying a frozen layer of the precursor to the substrate and irradiate the frozen layer with an electron beam (), a stack of frozen layers () is built, each layer showing an irradiated part () in which the precursor is converted to another material. After applying the last layer the temperature is raised so that the unprocessed precursor () can evaporate. As a result 3D structures with overhanging features can be built.

Method for forming microscopic 3D structures

A method of using a direct electron detector in a TEM, in which an image with a high intensity peak, such as a diffractogram or an EELS spectrum, is imaged on said detector. As known the high intensity peak may damage the detector. To avoid this damage, the center of the image is moved, as a result of which not one position of the detector is exposed to the high intensity, but the high intensity is smeared over the detector, displacing the high intensity peak before damage results.

Method of using a direct electron detector for a TEM

A charged-particle microscopy includes irradiating a sample in measurement sessions, each having an associated beam parameter (P) value detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {P, M}, wherein an integer in the range of 1&#x2266;n&#x2266;N, and processing the set (S) by: defining a Point Spread Function (K) having a kernel value Kfor each value n; defining a spatial variable (V); defining an imaging quantity (Q) having fore each value of n a value Qthat is a three-dimensional convolution of Kand V, such that Q=K*V; for each value of n, determining a minimum divergence min D(M&#x2225;K*V) between Mand Q, solving V while applying constraints on the values K.

Charged particle microscopy imaging method

The invention relates to a method for forming microscopic structures. By scanning a focused particle beam over a substrate in the presence of a precursor fluid, a patterned seed layer is formed. By now growing this layer with Atomic Layer Deposition or Chemical Vapor Deposition, a high quality layer can be grown. An advantage of this method is that forming the seed layer takes relatively little time, as only a very thin layer needs to be deposited.

Method for forming microscopic structures on a substrate

The invention relates to a TEM with a corrector () to improve the image quality and a phase plate () to improve contrast. The improved TEM comprises a correction system completely placed between the objective lens and the phase plate, and uses the lenses of the corrector to form a magnified image of the diffraction plane on the phase plate.

TEM with aberration corrector and phase plate

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Eindhoven, Netherlands

Alan Frank De Jong