Leica Geosystems Ag

Kla Tencor Corporation

Leica Geosystems Hds, Inc.

Alan Aindow

Gregory Charles Walsh

Daimian Wang

Yanwei Liu

Ralph Storz

Li Wang

Embodiments may include methods and systems for obtaining location information regarding an object. In one example, a laser pulse may be generated. The laser pulse may be divided into a plurality of laser pulse signals. Each of the laser pulse signals may be provided to a corresponding delay path, each delay path having a different length. An output of each delay path may be directed to the object. A plurality of reflected time-separated laser pulse signals from the object may be detected. The plurality of time-separated laser pulse signals may be combined to provide a recombined laser pulse signal. The recombined laser pulse signal may be resolved to generate object location information regarding the object.

Lidar system

Methods and systems for using spectrally separated light pulses to collect more LIDAR information are presented. In one example, a laser pulse may be directed to a point on an object and a corresponding return light signal may be received. The return light signal may be wavelength separated into a plurality of spectral pulse components. Each of the spectral pulse components may be propagated down a separate fiber optic delay line each having a different length to provide a plurality of time-separated spectral pulse components. The time-separated spectral pulse components may be combined to provide a recombined spectral pulse signal. The recombined spectral pulse signal can be provided to an intensity-related measuring/detection circuitry to generate corresponding object location information and object spectral information regarding the point on the object.

LIDAR system

Photoelectron emission mapping systems for use with EUV (extreme ultraviolet) mask inspection and lithography systems are described. The mapping systems may be used to provide photoelectron emission maps for EUV photolithography masks and/or EUV mirrors. The systems use EUV photoelectron sources used for mask inspection or photolithography to impinge EUV light on the masks and/or mirrors. The EUV light generates photoelectron on the surfaces of the mask and/or mirrors and the photoelectrons are collected and analyzed by detectors placed away from optical spaces of the EUV chamber.

Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systems

Methods and systems for using spectrally separated light pulses to collect more LIDAR information are presented. In one embodiment, a monochromatic pulse is transmitted to collect range information and a white pulse is transmitted a short time afterwards to collect spectral responsivity information or color of the target. In another embodiment, the white light pulse is used to collect both range and spectral responsivity information of the target. In another embodiment, the spectral separated laser is spatially spread in order to collect range information over more than one point at a time.

Methods for using spectrally separated light pulses to collect more LIDAR information are presented. In one embodiment, a monochromatic pulse is transmitted to collect range information and a white pulse is transmitted a short time afterwards to collect spectral responsivity information or color of the target. In another embodiment, the white light pulse is used to collect both range and spectral responsivity information of the target. In another embodiment, the spectral separated laser is spatially spread in order to collect range information over more than one point at a time.

The performance of a laser scanner is optimized in the field by automatically determining appropriate laser parameters for the scan location. A laser control system uses information such as the environmental temperature to select an appropriate range of start points for various laser parameters, such as pump temperature and laser currents. Test pulses over that range can be used to determine optimal operating parameters. In order to also meet safety regulations, the laser control system can use information such as range and pulse timing information to fire regularly spaced pulses that do not exceed acceptable exposure limits. Alternatively, the laser can be operated at a regular speed of about 24 Hz, or can be operated in burst mode where a burst of pulses creates what appears to be a brighter scan spot, but the time delay between bursts allows time for a blink reflex.

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Alameda, CA, United States of America

Alan Aindow