Université Cote D'azur

Centre National De La Recherche Scientifique

Universite Grenoble Aples

Université Grenoble Alpes

Alain Spang

François Henault

Systems for inspecting a surface of an optical wave originating from an optical device are provided. The optical device includes an exit pupil, and the inspection system includes an optical measuring head and a computer for processing the images from said optical measuring head. The optical measuring head includes a density gradient filter, the density varying periodically in the two directions in space, a matrix frame having at least four identical lenses of square shape of the same focal length and being arranged symmetrically, and a photodetector array, each of the four lenses forming an image of the pupil in the plane of this array. The image processing computer includes computing means for computing the partial derivatives of the wave surface &#x394;(x, y) in the plane of the exit pupil.

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Vence, France

Alain Spang