Centre National De La Recherche Scientifique

Ecole Centrale De Lille

Université De Lille

Centrale Lille Institut

Alain Merlen

Philippe Pernod

Abdelkrim Talbi

Vladimir Preobrazhensky

Leticia Gimeno Monge

Farzam Zoueshtiagh

Christophe Frankiewicz

Romain Viard

Romain Victor Jean Viard

Vincent Mortet

Ali Soltani

Philippe Jacques Pernod

A method for generating a flow of fluid, implemented in a device including a membrane () provided with at least one hole () and elements () generating back-and-forth movements, wherein a flow is generated through the membrane by actuating the membrane, at least in the region of the at least one hole (), according to a mode of deformation of the at least one hole, causing the at least one hole to open and close and disturbing the fluid in order to generate the flow. The device suitable for implementing the method is also described.

Method for generating a flow of fluid

The invention relates to a miniaturized sensor having a heating element, and to an associated production method. The sensor includes a substrate, a cavity and a heat-insulating structure suspended above the cavity by areas connecting to the substrate. The heat-insulating structure includes at least two bridges extending above the cavity, the heating element being supported by said bridges, extending transversely thereto.

Miniaturized sensor comprising a heating element, and associated production method

The invention relates to a submillimeter-sized hot-wire sensor () comprising a substrate (), two support rods (), a metal wire () extending between the two ends of the support rods (), and electrical contacts () disposed on the support rods, said contacts each being linked to one of the ends of the wire (). The metal wire comprises at least two layers of metal materials, one of said layers being made of a material exhibiting a residual stress under tension and the other layer being made of a material exhibiting a residual stress under compression. The thicknesses of these metal layers are adapted so as to compensate the residual stresses between the various layers.

Hot-wire sensor of submillimeter size and associated method of production

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Lille, France

Alain Merlen