Newport Corporation

Alain Jeanne

Roger Desailly

Stéphane Bailloux

Laurent Courtemanche

Eric Durand

A multi-axis positioning system that may be used in conjunction with an inspection system includes multiple position sensors corresponding to multiple axes in conjunction with multiple motors also corresponding to multiple axes to provide high accuracy, high load and extended travel for controllable movement of an object in up to 6 degrees of freedom. Some embodiments of the multi-axis positioning system may include an x-y stage assembly, a bottom plate assembly coupled to the x-y stage assembly, a top plate assembly coupled to the bottom plate assembly, and a chuck secured to the top plate assembly with multiple position sensors configured to measure displacement between the x-y stage assembly and top plate assembly.

Multi-axis positioning device

The present application is directed to a linear motor and includes a first mounting plate having an interior face disposing one or more magnetic elements thereon, a second mounting plate having an interior face disposing one or more magnetic elements thereon, a cooling element positioned between the interior faces of the first and second mounting plates and defining one or more cooling passages therein, the cooling passages having one or more heat sink wall members therein, at least one end cap configured to be coupled to cooling element and enclose the cooling passages therein, at least one seal positionable between the end cap and the cooling element and configured to couple the end cap to the cooling element in sealed relation, and a forcer device positioned between the magnetic elements on the first and second mounting plates and configured to movably engage the cooling element.

Cooling system for linear motors

A specimen positioning mechanism () includes a movable stage () movable along multiple axes, a plate () connected to and supporting a specimen mounting chuck (), multiple linear displacement mechanisms () coupling the plate to the movable stage and mutually spaced apart at different locations between the movable stage and the plate and separately controllable to change distances between the movable stage and the plate, and a flexible member () coupling the movable stage and the plate. The flexible member is motion compliant in three axes of motion. The flexible member in response to linear displacements of the linear displacement mechanisms allows linear and rotational movement of the specimen mounting chuck in the three axes of motion compliance.

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Amilly, France

Alain Jeanne