Commissariat a L'energie Atomique

Agence Nationale De Valorisation De La Recherche (Anvar)

Alain F Deneuville

Philippe Gerard

Christian Bianchin

The transparent material is constituted by a thin film of a substoichiometric amorphous oxide of molybdenum or tungsten, the electrical conductivity of the material being dependent on the dose of optical radiation which it has received. The potential applications of the material include the fabrication of memory devices and image converter devices.

Transparent material having electrical conductivity which is dependent

The material is constituted by a sub-stoichiometric amorphous oxide doped by hydrogen corresponding to the formula MO.sub.x H.sub.y, where M is a metal of group VI such as tungsten, with 2.6 &lt; x &lt; 2.8 and 0.3 &lt; y &lt; 0.6. The method of fabrication of the material involves a cathodic reactive sputtering operation which is carried out by subjecting a target having a base of a metal of group VI such as tungsten or a metal oxide to an ion bombardment in the presence of a reactive gas which consists in particular of oxygen and hydrogen.

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Vif, France

Alain F Deneuville