Lynred

Scientifique (Cnrs)

Universite Paris-Saclay Centre National De La Recherche

Centre National De La Recherche Scientifique

Université Paris-Saclay

Alain Bosseboeuf

David Bunel

Sylvain Lemettre

Johan Moulin

A hermetic housing is disclosed () for an optoelectronic component () or a MEMS device configured to form an enclosure () within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window () transparent for at least one wavelength of interest (&#x3bb;); and a layer of a getter material () configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1&#x2212;P)*e_t&#x3c;&#x3bb;/2&#x3c0;k with &#x3bb; corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.

Hermetic housing comprising a getter, optoelectronic component or MEMS device incorporating such a hermetic housing and associated production method

Growing community of inventors

Massy, France

Alain Bosseboeuf