Saint-gobain Centre De Recherches Et D'etudes Europeen

Alain Allimant

Howard Wallar

Dominique Billieres

A powder of melted particles, more than 95% by number of the particles exhibiting a circularity of greater than or equal to 0.85. The powder including more than 99.8% of a rare earth metal oxide and/or of hafnium oxide and/or of an aluminum oxide, as percentage by mass based on the oxides. The powder has a median particle size Dof less than 15 &#x3bc;m, a 90 percentile of the particle sizes, D, of less than 30 &#x3bc;m, and a size dispersion index (D&#x2212;D)/Dof less than 2, and a relative density of greater than 90%. The Dpercentiles of the powder are the particle sizes corresponding to the percentages, by number, of n %, on the cumulative distribution curve of the size of the particles in the powder and the particle sizes are classified by increasing order.

Powder for coating an etch chamber

A powder formed of fused particles. More than 95% by number of the feed particles exhibiting a circularity of greater than or equal to 0.85. The powder contains more than 88% of a silicate of one or more elements chosen from Zr, Hf, Y, Ce, Sc, In, La, Gd, Nd, Sm, Dy, Er, Yb, Eu, Pr, Ho and Ta, less than 10% of a dopant, as percentage by weight based on the oxides. The powder has a median particle size Dof less than 15 &#x3bc;m, a 90 percentile particle size, D, of less than 30 &#x3bc;m, and a size dispersion index (D-D)/Dof less than 2. The powder has a relative density of greater than 90%. The Dpercentiles of the powder are the particle sizes corresponding to the percentages, by number, of n %, on the cumulative distribution curve of the size of the particles of the powder. The particle sizes are classified in increasing order.

Environmental barrier

The invention relates to a plasma torch, comprising: a plasma generator comprising a cathode extending along an axis X and an anode (), the cathode and the anode being arranged so as to be capable of generating, in a chamber (), an electric arc between the anode and the cathode due to an electrical voltage, the plasma generator also comprising a plasmagen gas injection device () comprising an injection pipe () leading, along an injection axis (I), to an injection opening () in the chamber; a means for injecting a material to be discharged into a plasma flow generated by said plasma generator, the plasma torch being characterized in that: the relationship R&#x2033; between: the radial distance (y) of said injection opening, defined as the minimum distance between the axis X and the center of said injection orifice; the largest transverse size (D) of the cathode in the region of the chamber downstream from the position P, wherein Pdenotes the axial position of maximum radial mutual encroachment of the anode and the cathode, is less than 2.5; and the projection of the injection axis (I) into a transverse plane passing through the center of the injection orifice of said injection conduit forms an angle &#x3b2; less than 45&#xb0; with a radius extending into said transverse plane and passing through the axis X and through the center of said injection orifice.

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Caumont sur Durance, France

Alain Allimant