Applied Materials, Inc.

Akshay Gunaji

Sanjeev Baluja

Tejas Ulavi

Uday Pai

Timothy J Roggenbuck

Kalesh Panchaxari Karadi

Juan Carlos Rocha-Alvarez

Jian Li

Kwangduk Douglas Lee

Paul Brillhart

Dmitry A Dzilno

Mayur G Kulkarni

Sanjay G Kamath

Zongbin Wang

Yubin Zhang

Sandeep Bindgi

Yong Xiang Lim

Exemplary semiconductor processing systems include a processing chamber, a power supply, and a chuck disposed at least partially within the processing chamber. The chuck includes a chuck body defining a vacuum port. The chuck also includes first and second coplanar electrodes embedded in the chuck body and connected to the power supply. In some examples, coplanar electrodes include concentric electrodes defining a concentric gap in between. Exemplary semiconductor processing methods may include activating the power supply for the electrostatic chuck to secure a semiconductor substrate on the body of the chuck and/or activating the vacuum port defined by the body of the electrostatic chuck. Some processing can be carried out at increased pressure, while other processing can be carried out at reduced pressure with increased chucking voltage.

Multi-pressure bipolar electrostatic chucking

A heater assembly having a top seal and a second seal configured to account for deviation in processing heights and motor runoff of a heater standoff. The top seal is positioned between a shield plate and a top plate and the bottom seal is positioned between a heater mounting base and the heater standoff.

Heater assembly with process gap control for batch processing chambers

Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.

Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers

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Karnataka, India

Akshay Gunaji