Minebea Mitsumi Inc.

Akiyo Yuguchi

Atsushi Kitamura

Toshiaki Asakawa

Eiji Misaizu

Shigeyuki Adachi

Yuta Aizawa

Aya Ono

Shinya Toda

Yosuke Ogasa

Iku Ishihara

Syota Taneda

A strain gauge includes a flexible resin substrate and a resistor formed of a film that includes Cr, CrN, and CrN, the resistor being situated on or above the substrate. A film thickness of the resistor is greater than or equal to 100 nm and less than or equal to 700 nm.

Strain gauge

A strain gauge includes a flexible substrate and a resistor formed of material including at least one of chromium or nickel, the resistor being situated above the substrate. The strain gauge includes a functional layer formed of an insulating material that has a higher thermal conductivity than the resistor, the functional layer being situated between the substrate and the resistor. The resistor includes multiple resistive patterns that are juxtaposed. The resistor includes folded portions each of which connects end portions of resistive portions that are next to each other. A first metallic layer formed of a material that has a higher thermal conductivity than the resistor is laminated on the folded portions.

A strain gauge includes a flexible resin substrate; a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate; a resistor formed of a film including Cr, CrN, and CrN, on one surface of the functional layer; and an insulating resin layer with which the resistor is coated.

Strain gauge with improved stability

A strain gauge includes a flexible substrate; a resistor formed of material including at least one from among chromium and nickel, on or above the substrate; and electrodes electrically coupled to the resistor. Each electrode includes a terminal section extending from a corresponding end portion from among end portions of the resistor; a first metallic layer formed of copper, a copper alloy, nickel, or a nickel alloy, on or above the terminal section; and a second metallic layer formed of material having better solder wettability than the first metallic layer, on or above the first metallic layer.

A strain gauge includes a flexible substrate; a functional layer formed of a metal, an alloy, or a metal compound, on one surface of the substrate; a resistor formed of a Cr composite film, on one surface of the functional layer; and an insulating resin layer with which the resistor is coated.

Strain gauge and sensor module

A strain gauge includes a flexible substrate, and a plurality of resistors each formed of a Cr composite film, on or above the substrate. The substrate is attached to a flexure element, the plurality of resistors including two resistors disposed at locations at which the two resistors are opposite to each other, such that the flexure element is interposed between the two resistors.

A strain gauge includes a flexible substrate, and a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate. The strain gauge includes a resistor formed of a film including Cr, CrN, and CrN, on one surface of the functional layer. The substrate includes a filler. Surface unevenness on one surface of the substrate is 15 nm or less, and the resistor has a film thickness of 0.05 &#x3bc;m or more.

Strain gauge with improved design to reduce pinholes and damage

A strain gauge includes a strain detecting unit and a temperature detecting unit that are formed on or above a flexible substrate. The strain detecting unit includes a resistor formed as a film containing Cr, CrN, and CrN, on one surface of a functional layer. A first metallic layer formed of a material of which a gauge factor is less than that of the resistor is laminated on a folded portion, and a resistance value of the first metallic layer on the folded portion is less than a resistance value of the folded portion. The temperature detecting unit is a thermocouple including a second metallic layer formed of a same material as the resistor, on or above the substrate; and a third metallic layer formed of a same material as the first metallic layer, on the second metallic layer.

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Shizuoka, Japan

Akiyo Yuguchi