Sony Manufacturing Systems Corporation

Akitaka Tsunogae

Masaaki Kusumi

Mitsuru Ohno

Michio Okano

Tomoyuki Nakada

Hideki Nakamori

Yoshihiko Ohkawara

Touru Sumiya

Teruyuki Miura

In a magnetic sensor () including a substrate () having a magnetism-sensitive element () formed thereon, a hard membrane () is formed on the outermost surface, an organic film () to relieve the stress caused by the hard membrane () is formed under the hard membrane (), and an inorganic film () to relieve the stress caused by the organic film () is formed between the organic film () and magnetism-sensitive element (). Also, an intermediate film formed from an element having a large force of bonding to carbon may be formed between the organic film () and hard membrane (). Thus, the magnetic sensor (MR sensor, for example) can be protected against an external shock.

Magnetic sensor and position detector

Growing community of inventors

Shizuoka, Japan

Akitaka Tsunogae