Ulvac, Inc.

Akisuke Hirata

Yutaka Kadowaki

Katsuhiko Mushiake

Shinji Isoda

There are provided a film forming equipment component having a structure in which an deposited film d formed on the component can be separated from the component for a time period shorter than the prior art to reduce damage due to a cleaning fluid S, and a method of cleaning such a component. A metal film layerelectrochemically less noble than the matrix metal materialof the aforementioned component is formed on the surface of the matrix metal materialthrough thermal spraying, vapor depositing, sputtering, laminating or other process. Alternatively, a second metal film layerelectrochemically more noble than the aforementioned matrix metal materialis formed on the surface of the metal film layerthrough said thermal spraying or other process. Thus, a local cell is formed between the metal film layerand the matrix metal materialor the second metal film layer. Therefore, the deposited film d can be separated from the matrix metal materialfor an extremely shortened time period, without damaging the matrix metal materialitself from the cleaning fluid S.

Components for a film-forming device and method for cleaning the same

In an Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.

Water collapsible aluminum film

Herein disclosed are a component of a film-forming device, in which a thin films is formed on a substrate using a film-forming material, whose surface structure makes any breakage, peeling off and/or falling off of a film adhered to the component quite difficult, while the structure permits easy removal of such an adhered film within a short period of time when cleaning the component as sell as a method for cleaning the component. A large number of through holes each extending from the back face to the top face of the component are formed for the penetration of a cleaning solution into the boundary between the component and a film of the film-forming material adhered to the surface of the component and formed during the formation of the foregoing thin film. This easily allows the peeling off and removal of the film adhered to the component within a short period of time as compared when the adhered film is dissolved only from the surface thereof.

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Chiba-ken, Japan

Akisuke Hirata