Tokyo Electron Limited

Akira Yasumuro

Hachishiro Iizuka

Koichiro Kimura

Kazuyuki Miura

Norihiko Tsuji

Atsushi Kobayashi

A semiconductor manufacturing apparatus is capable of reducing power consumption. The semiconductor manufacturing apparatusincludes a processing chamberthat has a top surfaceand forms a processing space S therein; a mounting tableprovided in the processing space S; an upper electrodeprovided above the mounting tableto face the mounting table; heatersandprovided around the upper electrodeand below the top surfaceof the processing chamberand configured to heat the upper electrode; and a heat insulating unit, mounted on the top surfaceof the processing chamber, having a plate-shaped memberand a heat insulating memberthat is provided on one main surfaceof the plate-shaped member

Semiconductor manufacturing apparatus

A film forming apparatus including a raw material supplying section for supplying a raw material of a liquid or a gas-liquid mixture, a raw material vaporizing section for vaporizing the raw material to form a raw material gas, and a film forming section for conducting a film forming treatment using the formed raw material gas, and a filter on the transport path for the raw material gas from the raw material vaporizing section to the film forming section. An outer edge of the filter is pressed to the inner surface of the transport path over the whole perimeter thereof by a cyclic supporting member, which is less prone to be deformed by a loading in the pressing direction than the outer edge, and is fixed to the inner surface of the transport path in a compressed state between the inner surface of the transport path and the supporting member.

Film forming apparatus and vaporizer

Middle plate for the shower head

Growing community of inventors

Miyagi, Japan

Akira Yasumuro