Shin-etsu Chemical Co., Ltd.

Akira Sato

Shoji Kano

Kenji Ito

There is disclosed a ceramic heating jig consisting of a susceptor on which a work to be heated is placed, a ceramic heater for heating the susceptor and at least one heat shielding plate for shielding heat of the ceramic heater wherein the susceptor and the heat shielding plate are located so that each of them is located across the ceramic heater each leaving a certain space therefrom, a thickness of the susceptor is 0.5 m to 5 mm, a thickness of the ceramic heater is 0.5 mm to 3 mm, a thickness of the heat shielding plate is 0.5 mm to 3 mm. Preferably, an interval between the members is 0.5 mm to 10 mm, and the members are elastically held as an integration by the elastic means and the restraint means There can be provided a ceramic heating jig wherein defects such as thermal deformation, breakage or the like of the susceptor or the like are hardly caused, temperature can be raised or lowered rapidly, and flatness of a susceptor can be kept even at high temperature.

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Annaka, Japan

Akira Sato