The Furukawa Electric Co., Ltd.

Other

Research Development Corporation of Japan

Akira Oyobe

Tsuyoshi Masumoto

Toshihiko Maeda

Hiroyuki Nakae

Nobuyuki Kagi

Kazunori Nakamura

Toshio Hirai

Atsushi Umeda

Yasumasa Sasaki

There is provided a dispersion compensating fiber comprising a center core in which a first dopant is doped substantially uniformly, an outer core provided at the outer periphery of the center core, in which the first dopant is doped so as to decrease gradually toward the outer periphery, and a clad provided at the outer periphery of the outer core, in which a second dopant is doped. The second dopant of the outer core is doped so that the viscosity on at least the outer periphery side of the outer core is substantially equal to the viscosity of the clad.

Dispersion compensating fiber

Quartz glass doped with rare earth element and production thereof

A membrane for use in an X-ray mask composed of a compound comprising at least three kinds of elements of boron (B), silicon (Si) and nitrogen (N) in which the content of silicon in the compound is at least 15 atomic percent, but less than 100 atomic percent, and the atomic ratio of Si/(B+Si) in the compound is at least 0.2, but less than one. The membrane is synthesized from source gases including at least the foregoing three kinds of elements by chemical reaction under such conditions that the ratio of nitrogen to boron plus silicon is at least one in the source gases and thereby depositing a film of the compound onto a substrate. Since the membrane thus prepared has a high transmittance in the visible region and X-ray and their residual stress can be readily controlled by adjusting the conditions for the formation of the membrane, it is suitable for the preparation of X-ray masks.

Membrane for use in X-ray mask and method for preparing the same

Growing community of inventors

Yokohama, Japan

Akira Oyobe