Panasonic Intellectual Property Management Co., Ltd.

Akira Oodaira

Motonari Katsuno

Gen Okazaki

Tetsuya Nakamura

Hisashi Yano

Shigeru Suzuki

In a pixel unit of a solid-state imaging device, a semiconductor substrate is provided with a plurality of photodiodes, a first insulating film includes a recess in a portion above each of the photodiodes, a second insulating film embeds the recess, a plurality of color filters is formed on the second insulating film, the color filters each corresponding to one of the photodiodes, a partition is provided between adjacent ones of the color filters, the partition being a part of a third insulating film, and in an area outside of the pixel unit, (i) a conductive film at least partially covered by the third insulating film is formed on the second insulating film, and (ii) the third insulating film formed on the conductive film and on the second insulating film near the conductive film has a film thickness smaller than a film thickness of the partition.

Growing community of inventors

Aomori, Japan

Akira Oodaira