Hitachi, Ltd.

Hitachi Video and Information System, Inc.

Akira Okamoto

Shigeru Kobayashi

Susumu Tsuzuku

Eisuke Nishitani

Hideaki Shimamura

Yuji Yoneoka

Satosi Kisimoto

Masashi Yamamoto

Sunao Matsubara

Hiroyuki Shida

Tokio Kato

Yukio Tanigaki

Junichi Ikoma

Sadayuki Nishimura

Akio Nakashima

Yoshihisa Hosoe

Tatsumi Hasebe

Yasutoshi Nakashima

A vacuum processing apparatus for performing various processes on a wafer in a vacuum chamber, and a film deposition method and a film deposition apparatus using this vacuum processing apparatus. The vacuum processing apparatus, the film deposition method and the film deposition apparatus using the vacuum processing apparatus according to this invention are characterized in that temperature control of the wafer is performed in a film deposition process, and particularly characterized in that after the emissivity calibration using a combination of a temperature calibration stage and a shutter is performed, the substrate is transferred to stages in a vacuum film deposition process chamber, and a film is deposited on the substrate by controlling the substrate temperature to a specified temperature.

Vacuum processing apparatus, and a film deposition apparatus and a film deposition method both using the vacuum processing apparatus

The present invention relates to vacuum processing equipment for processing a wafer in a vacuum, and film coating or forming equipment and method for forming a film on a wafer wherein radiation measurement and temperature control of the wafer is carried out by using an infrared radiation thermometer. Based upon the radiation measurement, heating and/or cooling of the wafer during processing is carried out.

Vacuum processing device and film forming device and method using same

Vacuum processing equipment, film coating equipment and deposition method

There is provided the construction of a multiprojection apparatus composed of a plurality of projection units arranged in the vertical and horizontal directions, in which a transparent holding strip having an H-shaped cross section is inserted between screens each composed of a lenticular sheet and a Fresnel lens, and the right and left ends of a multiscreen are supported by elastic support members, or in which a receive member for receiving the screen in the direction of the optical axis and a screen holding device are provided, the receive member has such a shape as not to block projection light corresponding to an image on the screen and is located near a joint of the screen and another screen, and the holding device is disposed on a black stripe of the lenticular sheet and always pulled by an elastic member toward the receive member. Therefore, according to the present invention, it is possible to restrict the missing of information due to joints of the screens.

Multiprojection apparatus

Growing community of inventors

Chigasaki, Japan

Akira Okamoto