Nippon Valqua Industries, Ltd.

Tohoku University

Tokyo Electron Limited

Topy Kogyo Kabushiki Kaisha

Akira Muramatsu

Tadahiro Ohmi

Yasuyuki Shirai

Masayuki Noguchi

Satoshi Kumaki

Daisuke Hayashi

Koji Sato

Tsutomu Yoshida

Yasushi Aburatani

Takashi Konno

Kenichi Takahashi

Seiji Oomura

Masaki Ohara

Akiyoshi Kurihara

Yukio Kobayashi

Kouji Sato

Kouji Toriyama

Shunsuke Tanaka

Hiromasa Muraki

Noriyuki Andou

Yuki Kuwamura

A sealing part that is inexpensive and enable excellent durability to be secured without the need for a predetermined sealing space as would be required for a double sealing structure. A sealing part seals an inside of a reduced pressure vessel from an outside, in which a high-elasticity polymeric material-eroding eroding substance is present and which is comprised of a substrate processing apparatus carrying out predetermined processing on a substrate housed in the reduced pressure vessel. The sealing part has a radical sealing member and a vacuum sealing member. The radical sealing member is disposed on an inside side of the reduced pressure vessel and is resistant to the eroding substance. The vacuum sealing member is made of the high-elasticity polymeric material and is disposed on an outside side of the reduced pressure vessel. At least one refuge space is formed through at least part of the radical sealing member and at least part of the vacuum sealing member being separated from one another. The radical sealing member and the vacuum sealing member are fitted together.

Sealing part and substrate processing apparatus

A metal gasket includes an outer ring that is formed in a substantially C-shaped cross-section having an opening in a circumferential direction and an inner ring that is disposed inside the outer ring, wherein the inner ring is configured in a polygonal shape of a cross section, and a pair of corner portions opposing to each other in the inner ring are disposed on inner circumferential faces on the both sides of the opening in the outer ring.

Metal gasket

A low-compression force metal gasket includes a coating layer containing a polymer material on at least a sealing surface of the gasket, and the coating layer satisfies the following conditions (1) to (3): (1) the layer comprises a resin, a rubber or a mixture thereof having an oxygen gas permeability coefficient at 25&#xb0; C. of 10&#xd7;10to 0.1&#xd7;10(m/s); (2) when the layer is compression deformed, the storage elastic modulus (E') at 200&#xb0; C. is in the range of 1.0&#xd7;10to 1.0&#xd7;10Pa; and (3) the coating layer has a thickness of 1 to 40 &#x3bc;m. The gasket provides a high seal at a low clamping force.

Low-compression force metal gaskets

Hybrid seal member

A composite sealing material to be installed in a sealing groove includes a first sealing member that is located on the outer peripheral side of the sealing groove and that is made of an elastic member; and a second sealing member that is located on the inner peripheral side of the sealing groove and that is made of a material harder than the first sealing member, wherein the first sealing member is provided with a crosswise protrusion formed projecting in a radial inner direction from a radial inner side of the almost central section of the thickness direction; the second sealing member is formed in an almost cross sectional C shape by flange portions and formed at the both ends and an inner wall portion in an almost linear shape for connecting the flange portions; and a space is ensured between the crosswise protrusion and the inner wall portion in an almost linear shape of the second sealing member in a state that the first sealing member and the second sealing member are assembled in an integrated manner.

Composite sealing material

When the composite sealing material is press-fitted, the swelled portion of the first sealing portion of a first sealing member is press-fitted to impart sealing ability, the second extended portion of a second sealing member is pressed to the opening portion side of a sealing groove through the first extended portion of the first sealing member, and the upper surface of the second sealing portion is press-fitted to impart sealing ability.

A seal for an endless track has a cross section having a centerline parallel to an axis of the seal and a configuration symmetric with respect to the centerline of the cross section. The seal can include an elastically deformably configured portion having a cross section like alphabetical letter X, and a protrusion extending from an intersection of legs of letter X in a bushing-side direction further than a plane connecting bushing-side end portions of the legs of letter X. The protrusion has an end surface where the protrusion contacts the bushing. The seal can further include an embedding portion embedded in a space between legs of letter X, on a bushing-side of the intersection of the legs of letter X.

Seal for an endless track

Growing community of inventors

Machida, Japan

Akira Muramatsu