Asahi Kogaku Kogyo Kabushiki Kaisha

Asahi Kogaku Kogyo K.k.

Akira Morimoto

Satoru Tachihara

Yuji Matsui

Masatoshi Iwama

Akira Ohwaki

Takashi Okuyama

Yasushi Ikeda

Hideyuki Morita

Tamihiro Miyoshi

Hidetaka Yamaguchi

Toshitaka Yoshimura

Mitsuo Kakimoto

Michio Ohshima

Takashi Iizuka

Jun Nonaka

Hiroaki Andoh

Mitsunori Iima

Masaaki Aoyama

Takehiro Nakatsue

Taizo Saito

Tazuko Ishizuka

Hiroaki Andon

Jun Nonoka

Yuji Matui

The laser beam emitted by a laser light source is first brought to an image in an auxiliary scanning plane, and reflected by a slit mirror provided in a prism block. The arrangement is such that this laser light is incident on the scanning deflector along the optic axis of the scanning lens, and a screen is provided for obstructing ghosting in the vicinity of the scanning surface. Further, either the side of the prism block on which the light is incident or the side from which it emerges is curved, or both are curved, or one side of the prism block is treated to prevent reflection. Further, a screen is provided between the laser light source and the slit mirror so as to obstruct that part of the light incident on the mirror which is reflected by the mirror after being reflected by the scanning deflector.

Scanning optical system

A scanning optical system according to the present invention comprises a laser light source, a scanning deflector for deflecting a laser beam from said laser light source, a scanning lens for focusing deflected light on a scanning surface, a focusing point changing element for changing a focusing point so that a curvature of field is reduced.

A scanning optical system for preventing ghosting is provided wherein a laser beam emitted by a laser light source is first brought to an image in an auxiliary scanning plane, and reflected by a slit mirror provided in a prism block. The laser beam is incident on the scanning deflector along the optical axis of the scanning lens, and a screen is provided for obstructing ghosting in the vicinity of the scanning surface. Further, at least one side of the prism block on which the light is incident from which the light emerges is curved, or one side of the prism block is treated to prevent reflection. Further, the screen is disposed between the laser light source and the slit mirror so as to obstruct the part of the light beam incident on the mirror which is reflected by the mirror after being reflected by the scanning deflector.

A scanning optical system has a drawing light source, a rotary scanning deflector, a scanning lens and a detection device for detecting a rotational position of the scanning deflector. The drawing light source is controlled by a timing control signal generated by a timing control device as a function of drawing data. The scanning optical system may have a transmission scale, a scanning light receiving portion and a diffusion plate disposed between transmission scale and scanning light receiving portion and adapted to diffuse the monitor beam made incident to the scanning light receiving portion.

A scanning optical apparatus has a laser beam source for emitting a laser beam, a scanning deflector for deflecting and scanning the laser beam in a principal scanning plane, a scanning lens for imaging the deflected laser beam on a scanning surface to form a spot thereon, an imaging lens for forming the laser beam from the laser beam source into a line spread function image in an auxiliary scanning plane that is perpendicular to the principal scanning plane before the laser beam is made incident to the scanning deflector, a static deflector which is located on the line spread function image and which is adapted to guide the beam from the light source to the scanning deflector and guide the reflected beam from the scanning deflector to the scanning lens, and a holding member for holding at least the laser beam source, the imaging lens and the static deflector separately from other optical elements.

Scanning optical apparatus

An anamorphic optical system is provided with an imaging lens group comprising one or more plastic lenses and a single plastic correcting lens disposed on the image plane said of the imaging lens. The focal displacement of the optical system due to temperature changes is kept within the focal depth of the system.

Anamorphic optical system

A light scanning apparatus is disclosed having: a light source portion, a correction deflecting element for finely deflecting a light beam emitted by the light source portion in an auxiliary scanning direction, a scan deflector for deflecting the light beam from the correction deflecting element in a principal scanning direction, a lens system disposed between the correction deflecting element and the scan deflector and adapted to bring both of them in an optically conjugate relation, and a scanning lens for imaging the light beam deflected by the scan deflector onto a scanning surface.

Light scanning apparatus

A scanning optical system projects a light beam from a light source as a line spread function image in a principal scanning plane before the light beam is made incident onto a scanning deflector. A static deflector is disposed in a line spread function image position to guide a light beam from a light source to the scanning deflector. The static deflector has a slit mirror for reflecting a light beam from the light source or a mirror with a slit for permitting a light beam to be transmitted therethrough.

An exposure apparatus where a mask table having an exposing pattern and a work to be exposed are relative to each other movable, wherein the moving amount of the mask table is detected by a scale image formed through a projection lens system, so that even if the projection lens system has a magnification error, by optically offsetting it, the moving amount of the mask table can be detected. Thus, a more accurate control can be obtained so that a mask image can be more precisely reproduced on a work.

Exposure apparatus

A light scanning system has a light source, a deflecting device, an anamorphic scanning lens having different refracting powers in a principal scanning plane and in a secondary scanning plane perpendicular to the principal scanning plane and another anamorphic convex lens, such as a cylindrical lens, having a larger refracting power in the secondary scanning plane than in the principal scanning plane. The anamorphic convex lens is rotatable for adjustment about an axis of rotation that is substantially parallel with the optical axis of the optical system. When a tapered polygon mirror is used as the deflecting device, the anamorphic convex lens is mounted in a tilted manner such that two principal meridians projected via the reflecting surface of the deflecting device substantially coincide with respective scanning planes.

Light scanning system

A scanning optical system projects a light beam from a light source as a line spread function image in a principal scanning plane before the light beam is made incident onto a scanning deflector. A static deflector is disposed in a line spread function image position in order to guide a light beam from a light source to the scanning deflector. The static deflector has a slit mirror for reflecting a light beam from the light source or a mirror with a slit for permitting a light beam to be transmitted therethrough.

A light scanning system has a light source, a deflecting device, an anamorphic scanning lens having different refracting powers in a principal scanning plane and in a secondary scanning plane perpendicular to the principal scanning plane, and another anamorphic convex lens, such as a cylindrical lens, having a larger refracting power in the secondary scanning plane than in the principal scanning plane. The anamorphic convex lens is rotatable for adjustment about an axis of rotation that is substantially parallel with the optical axis of the optical system. When a tapered polygon mirror is used as the deflecting device, the anamorphic convex lens is mounted in a tilted manner such that two principal meridians projected via the reflecting surface of the deflecting device substantially coincide with respective scanning planes.

A scanning pattern drawing apparatus which scans the surface of a workpiece with a light beam so that a pattern is described on the workpiece with the issued light beam being controlled on the basis of pattern drawing data stored in a pattern memory, wherein the pattern drawing apparatus is able to read many pieces of data in a short period of time even if the frequency of the timing pulses is reduced and which therefore is capable of drawing a precise pattern on a workpiece. A scanning pulse generator produces as scanning pulse in response to a predetermined amount of scanning with the light beam. The scanning pulse is converted to a plurality of resulting timing pulses, and successive parallel outputs of the timing pulses are produced after delaying by a predetermined time. The pattern drawing data is read from the pattern memory in response to the delayed timing pulses.

Scanning pattern drawing apparatus

In a scanning device capable of building a distortion-free two-dimensional image on a surface to be scanned. The scanning operation for two directions are independently executed. Employable is a linear light source. In this case, the scanning in one direction of the two-dimensional scanning is responsive to the position of the light emitting elements in the linear light source.

Apparatus for producing a distortion-free two-dimensional image of a

A drawing surface adjusting mechanism suitable for use with a large scanning pattern drawing apparatus in which a scanning optical system scans drawing rays of light along scanning lines on a workpiece on a drawing board. A plurality of light-emitting units project rays of light in a wavelength region outside a sensitivity range of the workpiece onto a drawing surface of the workpiece in such a way that the rays substantially converge at more than one point along a scanning line of the drawing rays of light, preferably at center and end points along the scanning line. A plurality of condenser lenses are provided for focusing beams of light from the plural light-emitting units after the beams have been reflected by the drawing surface. A plurality of light-detecting elements are disposed at points of condensation by respective ones of the condenser lenses to produce output signals representing differences in condensation points that occur as the lenses depart from or approach the drawing surface. A drive unit effects relative displacement between the scanning optical system and the drawing board in response to the outputs from the light-detecting elements.

Growing community of inventors

Tokyo, Japan

Akira Morimoto