Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Akira Mino

Takashi Shimizu

Hideto Takekida

Masahisa Sonoda

Yuta Watanabe

Hisakazu Matsumori

Jun Murakami

A semiconductor memory device of embodiments includes a semiconductor substrate having a first and a second region adjacent to the first region in a first direction, a laminated body including electrode layers laminated on the semiconductor substrate in a second direction, a first insulator splitting the laminated body at the second region in a third direction, and extending in the first and second direction, and branching into two insulator films at the first region, and enclosing continuously a first portion of the laminated body, a contact portion extending in the first portion in the second direction, and a memory portion extending through the laminated body and the first insulator in the second direction at the second region. A first width in the third direction of the first portion is wider than a second width in the third direction of at least one of the electrode layers at the second region.

Semiconductor memory device and manufacturing method thereof

A nonvolatile semiconductor storage device includes a semiconductor substrate; a first insulating film disposed above the semiconductor substrate; a first electrode film disposed above the first insulating film; a second insulating film disposed above the first electrode film; a second electrode film disposed above the second insulating film; a third electrode film filling a first trench and overlying the second electrode film, the first trench having a first width and a first depth and extending through the second electrode film and the second insulating film and into the first electrode film; and a first barrier metal film and a first metal film disposed above the third electrode film; wherein the third electrode film above the second electrode film has a first thickness equal to or less than &#xbd; of the first width of the first trench.

Nonvolatile semiconductor storage device and method of manufacturing the same

Growing community of inventors

Yokkaichi, Japan

Akira Mino