Nikon Corporation

Akira Kayatama

Noboru Akami

Yuji Watanabe

A shield device includes: a main body having an opening portion; a cylindrical member that is movable in a direction substantially perpendicular to the opening portion; and a shield member, an outer edge of which is engaged to an inner edge of the opening portion, and an inner edge of which is fitted upon an outer surface of the cylindrical member so as to be slidable thereon and so as to shield a gap between the main body and the cylindrical member. And the cylindrical member is movable through the opening portion in a direction of a central axis of the cylindrical member; at least a portion of an outer circumferential surface of the cylindrical member has a shape different from another portion thereof along the direction of the central axis; and the shield member contacts along the outer circumferential surface having the different shape, as the cylindrical member moves in the direction of the central axis.

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Koganei, Japan

Akira Kayatama