Mitsui Petrochemical Industries, Ltd.

Akira Itani

Kazuo Shimazaki

Akihito Ohga

A non-linear optical material is used to convert a solid state laser ray of light output of a first wavelength into light of a shorter wavelength. The light output of shorter wavelength is suitable for use as a light source for lithography. Wavelengths as short as those obtained by excimer laser devices can be achieved. When the light source is used in lithography, the degree of integration of ICs for the new generation of 16MDRAM can be achieved more safely and simply than possible with excimer lasers.

Solid state laser device for lithography light source and semiconductor

A process for producing barium titanates which comprises admixing a titanium alkoxide with a barium salt of a lower carboxylic acid in the presence of an organic solvent containing at least ethylene glycol monomethyl ether to provide a uniform mixture, bringing the mixture in contact with water to form a gelated product and drying and calcining the gelated product.

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Chiyoda, Japan

Akira Itani