National Institute for Materials Science

Research Development Corporation of Japan

Japan Electronic Materials Corporation

Akira Ishida

Takeshi Konno

Kazumichi Machida

Atsuo Urata

Mikihiko Kobayashi

Mitsuru Egashira

Morio Sato

It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probecomprises a columnar contact partwhich can come in contact with an electrodeof an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part, the contact partcomprises a base partand an expansion partbonded to an end of the base partin a width direction, and the expansion partis formed of a material having a thermal expansion coefficient higher than that of the base part

Bimetallic probe with tip end

An apparatus for measuring displacement by light wave interference, wherein means are provided to determine true displacement in spite of atmospheric flicker in the light path. Two coherent light beams of different wavelengths are transmitted over a common path and reflected from a light reflector means, the displacement of which is to be measured. The reflected beams are separated and compared with reference beams to measure a phase difference for each reflected beam, and signal processing means is provided for calculating atmospheric flicker error from the phase differences, and for determining true displacement by taking the measured error into consideration.

Light wave interference length-measuring apparatus

Growing community of inventors

Tsukuba, Japan

Akira Ishida