Furukawa-sky Aluminum Corporation

Akira Fukuchi

Katsumi Watanabe

A heater plate may be manufactured by receiving a sheath heater within a groove portion formed in a base member made of aluminum or aluminum alloy. At least one joint member made of aluminum or aluminum alloy may be placed into the groove portion so as to fix the sheath heater in the groove portion. The joint member may have two correspondingly tapered portions facing each other which extend toward a lower end thereof such that a distance between the two tapered portions becomes narrower and a width of a surface portion contacting with the sheath heater in the joint member is larger than a width of the sheath heater. The base member and the joint member may be metal-bonded such that a force is added from an upper surface of the base member toward the sheath heater direction, wit the sheath heater fixed in place therebetween.

Heater plate and a method for manufacturing the heater plate

A heater plate manufactured by receiving a sheath heater within a groove portion formed in a base member made of aluminum or aluminum alloy, placing a joint member made of aluminum or aluminum alloy into said groove portion so as to fix said sheath heater in the groove portion, and press-forging said base member and said joint member to be metal-bonded with said sheath heater fixed in place therebetween, wherein a cross section of said joint member comprises a rectangle, and a width of said rectangle is same as or a little larger than a width of a cross section of the groove portion.

The present invention is directed to a gas supply nozzle plate constructed by laminating a plurality of metal members each having a fluid path and branch. A fluid nozzle plate member provided by the invention has high sealing at a joined part, and high reliability even when used in high vacuum or at a high temperature. The fluid nozzle plate member comprises a plurality of plate-like metal members each having a fluid path and/or a branch. In this case, the plurality of plate-like metal members are laminated, and the laminated surfaces thereof are joined together by press forging.

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Tokyo, Japan

Akira Fukuchi