Smc Kabushiki Kaisha

Akio Sato

Tomoyuki Okuyama

Haruhiko Okuno

Tetsuro Maruyama

Mitsuhiro Saitoh

Toru Horiuchi

Yuji Tsuda

Ge Pinghou

Kenji Moriyama

Akira Chiyoda

Pressure detection switch with a terminal box

A flow rate control valve includes a second substrate having a flexible thin film and interposed between a first substrate having a heating mechanism and a third substrate having a sealing section. The first substrate and the second substrate close an internal space formed adjacent to the heating mechanism and filled with an expandable material. The sealing section and the flexible thin film function together as a valve. The heating mechanism heats and expands the expandable material whose pressure is detected by pressure-detecting sensors. The detected pressure value is fed back to a control mechanism of the heating mechanism for opening/closing a fluid flow passage and controlling the valve opening degree.

Flow rate control valve

An air is fed from an air supply source to a detecting nozzle via a first fixed throttle section. The air is jetted from the detecting nozzle to the workpiece W to obtain a nozzle back pressure for detecting a position of a workpiece W. A first diffuser section is disposed downstream of the first fixed throttle section.

Position-detecting apparatus

A flow rate control valve comprises a piezoelectric actuator and a displacement amount-amplifying mechanism for amplifying a displacement amount of the piezoelectric actuator. An amplified displacement amount, which is amplified by the displacement amount-amplifying mechanism, is transmitted to a valve head. The valve head is operated to regulate a flow rate of a fluid passing through a communication passage for making communication between an inflow passage and an outflow passage of a valve body. The displacement amount-amplifying mechanism is provided with an input section and an output section which are displaceable along an axis, and a displacement-transmitting section which is tiltably displaceable by a predetermined angle.

Pressure detection switch

A speed control apparatus for a cylinder comprises the cylinder, speed controllers for controlling flow rates of a pressure fluid introduced into and discharged from cylinder chambers, a controller for outputting control signals to the speed controllers, and a sensor for detecting the displacement amount of a piston of the cylinder to transmit a detection signal to the controller. Each of the speed controllers includes a throttle section for controlling the flow rate of the pressure fluid flowing through the fluid passage, and a throttle amount control section for changing the throttle amount at the throttle section on the basis of the control signal transmitted from the controller.

Speed control apparatus for cylinder

A suck back valve comprises an ON/OFF valve, a suck back mechanism, a first sensor for detecting a displacement amount of a first diaphragm of the ON/OFF valve, and a second sensor for detecting a displacement amount of a second diaphragm corresponding to a suction amount of a coating liquid. The suck back valve further comprises a control unit for feedback-controlling the valve displacement speed of the ON/OFF valve and the suction amount of the coating liquid on the basis of detection signals obtained by the first sensor and the second sensor respectively.

Growing community of inventors

Soka, Japan

Akio Sato