Tokyo Electron Limited

Akio Miyara

Yoshinobu Ohya

Yun Mo

Keishi Kariya

A vacuum processing apparatus includes a heat receiving member having a heat receiving surface configured to receive heat from a heat source; and a coolant path formed within the heat receiving member along the heat receiving surface and configured to allow a coolant to flow therein. The coolant path has, at a pair of second inner wall surfaces intersecting with a first inner wall surface disposed near the heat receiving surface, a first groove extending in an inclined direction toward the first inner wall surface with respect to a flow direction of the coolant.

Growing community of inventors

Saga, Japan

Akio Miyara