Kabushiki Kaisha Toshiba

Tokyo Shibaura Denki Kabushiki Kaisha

Akio Hori

Michiko Hara

Hideaki Fukuzawa

Yoshihiko Fuji

Tomohiko Nagata

Yoshihiro Higashi

Shiori Kaji

Akiko Yuzawa

Hiroaki Yoda

Naoyuki Inoue

Hitoshi Iwasaki

Susumu Hashimoto

Kei Masunishi

Atsuhito Sawabe

Kohichi Tateyama

Masatoshi Yoshikawa

Takashi Koizumi

Yuichi Ohsawa

Kazuaki Okamoto

Nobuaki Yasuda

Takeo Sakakubo

Yoshiaki Sugizaki

Akihiro Kojima

Tadahiko Kobayashi

Tatsuya Ohguro

Mariko Takayanagi

Norio Ozawa

Hiromi Sakata

Akira Kikitsu

Masashi Sahashi

Yuzo Kamiguchi

Shotaro Baba

Yoshiaki Terashima

Shin-ichi Nakamura

Kenji Otsu

Yoshikatsu Takeoka

Masayuki Takagishi

Hiromi Yuasa

Tomomi Funayama

Sumio Ikegawa

Masayuki Sagoi

Hiromitsu Takeda

Miki Mori

Shuichi Komatsu

Hisashi Yoshino

Masako Nakahashi

Shinji Arai

Katsutarou Ichihara

Tadao Miura

Tatsuo Yamazaki

Yuichi Osawa

Makoto Shirokane

Masayuki Kii

Kisaku Nakamura

Haruyuki Goto

Tomomi Tunayama

Takasi Koizumi

Kei Sakoda

Teruo Sasho

Eiji Jimi

According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.

Strain sensing element and pressure sensor

According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

Sensor, electronic device, microphone, blood pressure sensor, and touch panel

According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.

Microphone package

According to one embodiment, a strain sensing element is provided on a film unit configured to be deformed. The strain sensing element includes a functional layer, a first magnetic layer, a second magnetic layer, and a spacer layer. The functional layer includes at least one of an oxide and a nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. A magnetization of the second magnetic layer is variable in accordance with a deformation of the film unit. The spacer layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and includes boron.

Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel

An inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

Inertial sensor

According to one embodiment, a strain and pressure sensing device includes a semiconductor circuit unit and a sensing unit. The semiconductor circuit unit includes a semiconductor substrate and a transistor. The transistor is provided on a semiconductor substrate. The sensing unit is provided on the semiconductor circuit unit, and has space and non-space portions. The non-space portion is juxtaposed with the space portion. The sensing unit further includes a movable beam, a strain sensing element unit, and first and second buried interconnects. The movable beam has fixed and movable portions, and includes first and second interconnect layers. The fixed portion is fixed to the non-space portion. The movable portion is separated from the transistor and extends from the fixed portion into the space portion. The strain sensing element unit is fixed to the movable portion. The first and second buried interconnects are provided in the non-space portion.

Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone

According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.

Pressure sensor, acoustic microphone, blood pressure sensor, and touch panel

A pressure sensor according to an embodiment includes: a support member; a membrane supported by the support and having flexibility; and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.

Pressure sensor

A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu&#x2014;Ag alloy.

Strain detection element, pressure sensor, microphone, blood pressure sensor, and touch panel

Growing community of inventors

Kanagawa-ken, Japan

Akio Hori