Teijin Seiki Co., Ltd.

Akio Hashimoto

Hiroki Mori

Kazuyuki Matsumoto

A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

Sealing mechanism for sealing a vacuum chamber

In a transmission gear for transmitting two rotary motions from a driving mechanism to a working mechanism, the transmission gear comprises a cylindrical support member, a flexible cylindrical member fixedly supported by the cylindrical support member, first and second input shaft members, and first and second output shaft members. The first and second input shaft members have non-circular peripheral portions, respectively. The first and second output shaft members have internal circular portions radially opposite to and spaced apart from the non-circular peripheral portions of the first and second input shaft members, respectively. The flexible cylindrical member interposes between the non-circular peripheral portions of the first and second input shaft members and the internal circular portions of the first and second output shaft members. The flexible cylindrical member further having a buffer portion between the first and second transformable intervening portions for allowing the first and second transformable intervening portions to transform independently of each other without interference, thereby transmitting the rotary motions from the first and second input shaft members to the first and second output shaft members, respectively, in independent relationship to each other.

Transmission gear

A screw fastening device comprising a casing, a motor connected to the casing, a block body rotatably housed in the casing and having a pair of axially spaced plate portions, a plurality of torque transmitting pins each rotatably supported on the plate portions of the block body, the pins having eccentric cam portions, respectively, and being rotated by the motor, an externally toothed gear formed with engagement portions engaged by the eccentric cam portions of the torque transmitting pins, an internally toothed gear fixedly mounted in an inner periphery of the casing so that it can engage with the externally toothed gear, the internally toothed gear being slightly different in number of teeth from the externally toothed gear, and a rotational output shaft connected to either one of the plate portions of the block body. The externally toothed gear is given an eccentric motion and rotated by the rotations of the torque transmitting pins, and the block body is rotated by the rotation of the externally toothed gear.

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Tsu, Japan

Akio Hashimoto