Honeywell G.m.b.h.

Other

Akintunde I Akinwande

James Kevin Carney

Robert D Horning

David W Burns

Thomas George Stratton

G Benjamin Hocker

Deidrich J Saathoff

Scott A McPherson

Amir R Mirza

Kalluri R Sarma

This patent relates to the fabrication of diaphragm-based microstructures used primarily for sensing physical phenomena by detecting a change in deflection, resonance, or curvature of the diaphragm. The methods of fabrication described and claimed herein relate primarily to diaphragm-based diaphragms made of silicon, either single crystal or polycrystalline in form, although other materials may be used.

Method for making diaphragm-based sensors and apparatus constructed

A liquid crystal display having pixels illuminated by field emitter arrays. The field emitter arrays may be utilized to illuminate each pixel individually or to be a backlight lamp to illuminate the whole display, whether monochrome or color. A field emitter array back-lighted liquid crystal displays, whether active matrix or passive, provide greater compactness, higher luminous efficiency, more brightness, and longer lifetime than a fluorescent lamp. Field-emitter arrays may also provide light in various colors for the liquid crystal display thereby eliminating the need for color filters which result in duller colors than that of field emitter arrays. Each color filter absorbs two-thirds of the light that it receives. A color filter liquid crystal color display exhibits colors that have diminished chromaticity and purity in comparison to those of a field emitter array liquid crystal display.

Field emitter liquid crystal display

A field emitter structure with emitter edge comprising of individual comb elements. A resistive film is inserted between the lead-in conductor and the emitter edge and a conductive film is electrically attached to the conductor and capacitively coupled to the emitter.

Comb toothed field emitter structure having resistive and capacitive

The formation of diaphragms by silicon wafer bonding provides for a structure having at least two such diaphragms with cavities in the wafers to which the diaphragm layer is bonded. Passageways through the wafers provide for communication of a fluid to the diaphragms. In some locations less than all of a plurality of diaphragms may be bonded to only one wafter having a cavity adjacent the diaphragm.

Diaphragm-based-sensors

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Bloomington, MN, United States of America

Akintunde I Akinwande