Seiko Epson Corporation

Epson Toyocom Corporation

Akinori Yamada

Shuhei Yoshida

Makoto Furuhata

Masaru Mikami

Yuji Hamayama

Takayuki Kikuchi

Takashi Yamazaki

Shogo Inaba

Takashi Ito

Hiroki Kawai

Keiji Nakagawa

Aritsugu Yajima

Osamu Iwamoto

Katsuo Ishikawa

Takuya Kinugawa

Takanobu Matsumoto

A vibrating element includes a base and a first vibrating arm and a second vibrating arm extending from the base. The first vibrating arm includes a first arm and a first weight. The second vibrating arm includes a second arm and a second weight. In the vibrating element, 0.952&#x3c;M2/M1&#x3c;1.000, wherein M1 is mass on the second vibrating arm side of the first weight with respect to a first center line of the first arm and mass on the first vibrating arm side of the second weight with respect to a second center line of the second arm and M2 is mass on a side opposite to the second vibrating arm of the first weight with respect to the first center line and mass on a side opposite to the first vibrating arm of the second weight with respect to the second center line.

Vibrating element, vibrator, electronic device, and vehicle

A resonator element includes: a base portion including a first end surface that faces a first direction and a second end surface that faces a direction opposite to the first direction, a first vibrating arm that is provided integrally with the base portion and is connected to the first end surface; and a second vibrating arm that is provided integrally with the base portion along the first vibrating arm and is connected to the first end surface. When the shortest distance between the first end surface and the second end surface is Wb and an effective width between the shortest distance Wb and the base portion is We, 0.81&#x2264;Wb/We&#x2264;1.70 is satisfied.

Resonator element, resonator, electronic device, electronic apparatus, and moving object

A resonator includes: a resonator element that includes a base portion and a resonating arm; and a base. When n is one natural number of 2 or greater and j is 1 or greater and a natural number which is less than or equal to n, the resonator element performs resonations with n inherent resonation modes. In a relationship between arbitrary integers kand resonance frequencies fcorresponding to the n inherent resonation modes, respectively, when frepresents the resonance frequency of the main resonation of the resonator element and a normalized frequency difference &#x394;f is defined by a relationship of |&#x394;f|&#x2265;0.03 is satisfied. The arbitrary integers ksatisfy relationships of 3&#x2264;&#x3a3;|k|&#x2264;10 and n&#x2264;&#x3a3;|k|. A ratio of an amount of a change in the resonance frequency of the main resonation, to excitation power that electrically excites the main resonation, is 20 [ppm/&#x3bc;W] or higher.

Resonator, oscillator, electronic apparatus, and vehicle

A method for manufacturing a resonator element includes: an outer shape forming step of etching a substrate to form, in a plan view, a base portion, a pair of vibrating arms extending from the base portion in a first direction, a frame portion surrounding the base portion and the vibrating arms, and a coupling portion coupling the base portion with the frame portion; and a singulation step of cutting the coupling portion to singulate the resonator element. In the outer shape forming step, the coupling portion is formed so as to extend, in the plan view, from only one edge side of the base portion in a direction along a second direction orthogonal to the first direction and be connected with the frame portion.

Method for manufacturing resonator element, wafer, resonator element, resonator, oscillator, real-time clock, electronic apparatus, and moving object

A quartz crystal resonator element includes: a base portion and a pair of vibrating arms which extend from a first end portion of the base portion along a Y-axis direction. The base portion includes a second end portion provided on the opposite side to a first end portion in the Y-axis direction. The base portion is provided with a protrusion in at least one of a third end portion and a fourth end portion which respectively connect both ends of the first end portion and both ends of the second end portion.

Resonator element, resonator, oscillator, electronic device, and moving object

A resonator element includes: a base portion including a first end surface that faces a first direction and a second end surface that faces a direction opposite to the first direction, a first vibrating arm that is provided integrally with the base portion and is connected to the first end surface; and a second vibrating arm that is provided integrally with the base portion along the first vibrating arm and is connected to the first end surface. When the shortest distance between the first end surface and the second end surface is Wb and an effective width between the shortest distance Wb and the base portion is We, 0.81&#x2266;Wb/We&#x2266;1.70 is satisfied.

A resonator element includes a base portion and a pair of vibrating arms that are provided integrally with the base portion, are aligned in an X-axis direction, and extend in a Y-axis direction from the base portion. Each of the vibrating arms includes an arm portion and a wide hammerhead that is located on the free end side of the arm portion and has a greater length in the X-axis direction than the arm portion. Assuming that the length of the vibrating arm in the Y-axis direction is L and the length of the hammerhead in the Y-axis direction is H, the relationship of 1.2%&#x3c;H/L&#x3c;30.0% is satisfied. Assuming that the length of the arm portion in the X-axis direction is Wand the length of the hammerhead in the X-axis direction is W, the relationship of 1.5&#x2266;W/W&#x2266;10.0 is satisfied.

Resonator element having a pair of vibrating arms with wide portions and arm portions

A vibrator includes a vibrator element and a base on which the vibrator element is installed. In addition, when n is set to a natural number equal to or greater than 2, and j is set to a natural number equal to or greater than 1 and equal to or less than n, the vibrator element includes n inherent vibration modes having resonance frequencies different from each other, and when a resonance frequency of a main vibration of the vibrator element in the n inherent vibration modes is set to &#x3c9;in a relationship between an arbitrary integer kand a resonance frequency &#x3c9;corresponding to each of the n inherent vibration modes, the following three expressions are all satisfied. 

Vibrator, oscillator, electronic device for controlling internal resonance between inherent vibration modes

A resonator element includes a resonator blank having a base portion, a vibrating arm, a linking portion, and a connecting portion connects the base portion and the linking portion to each other, in which, when a thickness of the resonator blank is set to T, a width of the base portion is set to W1, and a width of the connecting portion is set to W2, a relationship of 50 &#x3bc;m&#x2266;T&#x2266;210 &#x3bc;m is satisfied, and a relationship of 0.067&#x2266;W2/W1&#x2266;0.335 is satisfied, and in which, when a width of the arm section of the vibrating arm is set to W3, and a width of the hammer head is set to W4, a relationship of W4&#x2267;2.8&#xd7;W3 is satisfied.

Resonator element, resonator, oscillator, electronic apparatus, and mobile object

A resonator includes a resonator device, a package on which the resonator device is mounted, and conductive adhesives which fix the resonator device to the package. A width of the base portion of the resonator device is set as W, a width of a linkage portion is set as W, a Young's modulus of the conductive adhesives is set as E, a relationship of &#x2212;1.3 GPa&#x2266;log E&#x2266;&#x2212;0.7 GPa is satisfied, and a relationship of 0.1&#x2266;W/W&#x2266;0.7 is satisfied.

Resonator, oscillator, electronic apparatus, physical quantity sensor, and mobile object

A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [&#x3bc;m], and lengths of the resonating arms are set to L [&#x3bc;m], at least one expression of the following Expression (1) and the following Expression (2) is satisfied.&#x3c;10&#x2003;&#x2003;(1)

Resonation element, resonator, oscillator, electronic device and moving object

A resonator element has a base part, vibrating arms having first principal surfaces and second principal surfaces in front-rear relationships with each other and extending from the base part, and side surfaces connected to the first principal surfaces and the second principal surfaces on ends of the vibrating arms, and the side surfaces are slopes having tilts with respect to perpendicular lines of the first principal surfaces or the second principal surfaces and provided from the first principal surfaces to the second principal surfaces, and crystal faces.

Resonator element, resonator device, electronic apparatus, moving object, and method of manufacturing resonator element

In a resonator element, when a width of each of arm portions of vibrating arms along an X-axis direction is set to W, a width of each of two portions with a groove interposed therebetween, along the X-axis direction, in a principal surface of the vibrating arm is set to W, and 2&#xd7;W/Wis set to &#x3b7;, the relation of 14.2%&#x3c;&#x3b7;&#x3c;100% is satisfied.

A resonator element satisfies, when a shortest distance between a first end portion and a second end portion of a base is Wb [m], an effective width of the base in a Y axis direction is We [m], and a Q value of the resonator element is Q, the following expressions (A) and (B).={(&#x3c1;&#xb7;)/(&#xb7;&#x398;)}&#xd7;[{1+(2&#xb7;&#x3c1;&#xb7;/(&#x3c0;&#xb7;))}/(2&#xb7;&#x3c1;&#xb7;/(&#x3c0;&#xb7;))]&#x2003;&#x2003;(A)0.81&#x2266;&#x2266;1.70&#x2003;&#x2003;(B)

Resonator element, resonator, oscillator, electronic apparatus, sensor, and mobile object

A resonator element includes a quartz crystal resonator blank provided with a base portion, vibrating arms extending from one end side of the base portion, a connecting portion which is disposed on the other end side of the base portion, and a coupling portion, located between the base portion and the connecting portion, which couples the base portion to the connecting portion. When a thickness of the quartz crystal resonator blank is set to T, a width of the base portion is set to W1, and a width of the coupling portion is set to W2, a relation of 110 &#x3bc;m&#x2266;T&#x2266;210 &#x3bc;m is satisfied, and a relation of 0.469&#x2266;W2/W1&#x2266;0.871 is satisfied.

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Ina, Japan

Akinori Yamada