Nippon Itf, Inc

Nippon Piston Ring Co., Ltd.

Akinori Shibata

Hideki Moriguchi

Yoshihiro Ito

Hiroyuki Sugiura

Takahiro Okazaki

Takehiko Ooshiro

Katsuaki Ogawa

Yoshikazu Tanaka

Tadashi Saito

Tetsumi Arahi

Shinya Kanazawa

A sliding member () including a coating film () composed of a hard carbon layer on a sliding surface () of a base material (). The coating film has, when a cross section thereof is observed by a bright-field TEM image, a thickness within a range of 1 &#x3bc;m to 50 &#x3bc;m, and is configured by repeating units including black hard carbon layers (B), relatively shown in black, and white hard carbon layers (W), relatively shown in white, and laminated in a thickness direction, and comprise an inclined region, provided on a base material side, where thicknesses of white hard carbon layers (W) of the repeating units gradually increase in a thickness direction, and a homogeneous region\, provided on a surface side of the sliding member, where thicknesses of the white hard carbon layers (W) of the repeating units are the same or substantially the same in the thickness direction.

Sliding member and coating film

The purpose of the invention is to provide technology, which, in addition to being capable of forming thick hard carbon films of excellent durability even using PVD, is able to establish both chipping resistance and wear resistance in the formed hard carbon film and able to improve low friction properties and peeling resistance. Provided is a coating film to be coated on the surface of a substrate, the coating film having a total film thickness of greater than 1 &#x3bc;m to 50 &#x3bc;m wherein: when a cross-section is observed using bright field TEM images, white hard carbon layers that are shown as relatively white and black hard carbon layers that are shown as black are alternately laminated in the thickness direction; and the white hard carbon layers have regions that have grown in a fan-shape in the thickness direction.

Coating film, manufacturing method therefor, and PVD apparatus

Provided is a physical vapor deposition (PVD) method in which a thick, hard carbon film having excellent durability can be formed, and chipping resistance and wear resistance can bot be achieved while improving the low friction properties and peeling resistance of the formed hard carbon film. Provided is a coating film having a total film thickness of greater than 1 &#x3bc;m and less than or equal to 50 &#x3bc;m, wherein, when observed using a bright field TEM image, the cross section of the coating film is revealed to consist of relatively white hard carbon layers and relatively black hard carbon layers alternately stacked in the thickness direction, and the white hard carbon layers have a region having a columns-shape, which has grown in the thickness direction.

Coating film, method for manufacturing same, and PVD apparatus

Provided are a coating film, a manufacturing method for the same, and a PVD device that not only sufficiently improve the balance of low-friction properties and wear resistance, but also improve chipping resistance and peeling resistance. This film is coated on a substrate surface, wherein the coating film has a hard carbon that presents relatively black and white when observed in a cross-sectional bright-field TEM image, a mesh-shaped hard carbon layer is formed using a PVD method, said layer having white-colored hard carbon in a mesh shape extending in the thickness direction and black-colored hard carbon dispersed into the cavities in the mesh, and the ID/IG ratio is 1-6 when the mesh-shaped hard carbon layer is measured using Raman spectroscopy, said ratio being the ratio of the Raman spectrum D band peak area intensity and G band peak area intensity.

Coating film, manufacturing method for same, and PVD device

Growing community of inventors

Kyoto, Japan

Akinori Shibata