Tokuyama Corporation

Akinori Koukitsu

Yoshinao Kumagai

Toru Nagashima

Reiko Okayama

The method for manufacturing an aluminum-based group III nitride single crystal includes the step of supplying an aluminum halide gas and a nitrogen source gas onto a base substrate, such that a reaction of the aluminum halide gas and the nitrogen source gas is conducted on the base substrate, wherein the reaction of the aluminum halide gas and the nitrogen source gas is conducted under coexistence of a halogen-based gas such that a halogen-based gas ratio (H) represented by the following formula (1) is no less than 0.1 and less than 1.0:/()&#x2003;&#x2003;(1)(In the formula (1), Vrepresents a supply of the halogen-based gas; and Vrepresents a supply of the aluminum halide gas); and a growth rate of the aluminum-based group III nitride single crystal is no less than 10 &#x3bc;m/h.

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Fuchu, Japan

Akinori Koukitsu