Toflo Corporation

Akinori Igawa

Junichi Nakamura

Shoji Takemoto

Ryuichiro Tabata

A thermal type flowmeter that can accurately perform flow rate determination at high speed and high precision even at low flow rate includes a sensor portion conducting heating and temperature detection of a fluid contact portion in contact with a fluid flowing in a flow path, and a control portion controlling heating and temperature detection conducted by the sensor portion. The control portion measures the temperature rise time until the temperature of the fluid contact portion reaches an upper limit set temperature when heating the fluid contact portion and the temperature drop time until the temperature of the fluid contact portion reaches a lower limit set temperature when stopping heating the fluid contact portion, and based on the temperature rise time and the temperature drop time, converts a determined flow velocity into a flow rate value so as to perform flow rate determination.

Thermal type flowmeter

There are provided a flow control valve and a flow control device suitable for allowing flow control of a fluid with high accuracy. Diaphragmsandare mounted to upper and lower openings, respectively, of an air chamber. The upper diaphragmand the lower diaphragmare connected by a connecting shaftand have pressurized surfaces with different areas that receive pressure of the air chamber. This causes a difference between forces applied to the two diaphragmsand, and the difference causes the connecting shaftand a valve bodymounted to an outer surface of the lower diaphragmto slide and be separated from a valve seat

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Hino, Japan

Akinori Igawa