Sharp Kabushiki Kaisha Corporation

Geomatec Co., Ltd.

Akinobu Isurugi

Kiyoshi Minoura

Hidekazu Hayashi

Takao Imaoku

Kenichiro Nakamatsu

Hiroyuki Sugawara

Tokio Taguchi

Akiyoshi Fujii

Eiji Satoh

Tomoko Teranishi

Ichirou Ihara

Minoura Kiyoshi

A mold is disclosed, which is capable of producing a nanoimprint film without a problem of clogging of irregularities of the mold with a resin material. A method for producing the mold and a method for producing a nanoimprint film using the mold are further disclosed. In an embodiment, the mold includes: a first surface having a nanostructure including plural recesses spaced at an interval of less than 1 &#x3bc;m between bottom points of adjacent recesses; and at least two second surfaces substantially not having the nanostructure, wherein the first surface is coplanar with the at least two second surfaces and is positioned between two second surfaces.

Mold, method for producing mold, and method for producing nanoimprint film

A mold base of an embodiment is a mold base for use in manufacture of a mold that has a porous alumina layer over its surface, including: a base; and an aluminum alloy layer provided on the base, wherein the aluminum alloy layer contains aluminum, a non-aluminum metal element, and nitrogen. The aluminum alloy layer of the mold base of an embodiment of the present invention has high specularity.

Mold base material, production method for mold base material, mold production method, and mold

A method is provided for manufacturing a mold that has a porous alumina layer over its surface, which is capable of preventing formation of pits (recesses). A moth-eye mold manufacturing method of an embodiment of the present invention is a method for manufacturing a mold which has a porous alumina layer over its surface, including the steps of: providing a mold base which includes an aluminum base and an aluminum film deposited on a surface of the aluminum base, the aluminum film having a purity of not less than 99.99 mass %; anodizing a surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions; and bringing the porous alumina layer into contact with an etching solution to enlarge the plurality of minute recessed portions of the porous alumina layer.

Die, process for producing die, and process for producing antireflection film

A method for manufacturing a moth-eye mold of an embodiment of the present invention employs a mold base including a metal base, an organic insulating layer provided on the metal base, and an aluminum alloy layer provided on the organic insulating layer, the aluminum alloy layer containing aluminum and a non-aluminum metal element M, an absolute value of a difference between a standard electrode potential of the metal element M and a standard electrode potential of aluminum being not more than 0.64 V, and a content of the metal element M in the aluminum alloy layer not exceeding 10 mass %.

Mold production method

A mold of at least one embodiment of the present invention includes: a base; a conductive layer provided on the base; and an anodized film provided on the conductive layer, the anodized film having an inverted motheye structure in its surface, the inverted motheye structure having a plurality of recessed portions whose two-dimensional size viewed in a direction normal to the surface is not less than 10 nm and less than 500 nm, wherein the base, the conductive layer, and the anodized film are capable of transmitting ultraviolet light.

Mold, mold manufacturing method and method for manufacturing anti-reflection film using the mold

The present invention provides a moth-eye film that is not likely to cause condensation on the surface. A moth-eye film including: a resin composition that, when formed into a flat film, has a contact angle with water of larger than 5&#xb0; but smaller than 31.3&#xb0;, the contact angle measured between a surface of the flat film and a droplet of water dropped onto the surface of the flat film, after 100 msec from contact of the droplet and the surface.

Moth-eye film

An anodized layer formation method of an embodiment of the present invention includes the steps of: (a) providing an aluminum base which has a surface that is made of aluminum; (b) anodizing the surface to form a barrier-type alumina layer; and (c) after step (b), further anodizing the surface to form a porous alumina layer which has a plurality of minute recessed portions. According to an embodiment of the present invention, a method is provided that enables formation of a porous alumina layer which has an interpore distance of a desired magnitude with the use of an aluminum base which has a surface that is made of aluminum, irrespective of the surface form.

Method for forming anodized layer, method for producing mold, method for producing antireflective film, and mold and antireflective film

A mold manufacturing method of an embodiment of the present invention includes the steps of: (a) providing a mold base; (b) partially anodizing the aluminum layer to form a porous alumina layer, the porous alumina layer having a porous layer which defines a plurality of minute recessed portions and a barrier layer which is provided at a bottom of each of the plurality of minute recessed portions; and (c) after step (b), performing etching, thereby enlarging the plurality of minute recessed portions of the porous alumina layer, wherein in step (c) the etching is performed such that an average depth of the plurality of minute recessed portions increases but does not exceed a 1/7 of an average thickness of the barrier layer before the etching.

Mold and process for production of mold

A moth-eye mold fabrication method includes: (a) providing an aluminum film deposited on a base, the aluminum film having a thickness of not less than 0.5 &#x3bc;m and not more than 5 &#x3bc;m, a surface of the aluminum film having a plurality of crystal grains whose average crystal grain diameter is not less than 200 nm and not more than 5 &#x3bc;m; (b) after step (a), anodizing the surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions; and (c) after step (b), bringing the porous alumina layer into contact with an etching solution, thereby enlarging the plurality of minute recessed portions of the porous alumina layer. A method of readily fabricating a mold is produced that is for manufacture of an antireflection film in which a moth-eye structure is superposed over an antiglare structure.

Mold, method for manufacturing a mold, and antireflective film

An electrode structure of the present invention includes: an aluminum electrode which is to be in contact with a surface of an aluminum base; a fixing member for fixing the aluminum electrode on the surface of the aluminum base; an elastic member provided between the fixing member and the aluminum base; a lead wire which is electrically connected to the aluminum electrode at least under a certain condition; and a cover member which is tightly closed with the lead wire penetrating through an opening.

Electrode structure, substrate holder, and method for forming anodic oxidation layer

One of the objects of the present invention is to provide a method for readily manufacturing a seamless mold in the form of a roll which has a porous alumina layer over its surface. The mold manufacturing method of the present invention is a method for manufacturing a mold which has a porous alumina layer over its surface, including the steps of: providing a hollow cylindrical support; forming an insulating layer on an outer perimeter surface of the hollow cylindrical support; depositing aluminum on the insulating layer to form an aluminum film; and anodizing a surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions.

Die, die production method, and production of antireflection film

A moth-eye mold fabrication method of an embodiment of the present invention includes the steps of: (a) anodizing a surface of an aluminum film to form a porous alumina layer which has a plurality of minute recessed portions; (b) after step (a), bringing the porous alumina layer into contact with an etching solution, thereby enlarging the plurality of minute recessed portions of the porous alumina layer; and (c) after step (b), further anodizing the surface to grow the plurality of minute recessed portions, wherein a voltage applied in step (c) is higher than a voltage applied in step (a). According to an embodiment of the present invention, a mold fabrication method is provided which is capable of preventing formation of a plurality of tiny pores in one micropore.

Mold and production method for same, and anti-reflection film

Disclosed is a tabular member that has an excellent low reflectivity and that can reduce coloring due to reflected light. In at least one example embodiment, specifically disclosed is a tabular member which comprises a base, a first antireflective film disposed on a surface of the base, and a second antireflective film disposed on the other surface of the base. The first and second antireflective films each have a plurality of projections on the surface thereof, and the distances between the apexes of two adjacent projections are shorter than or equal to the wavelength of visible light. The light obtained by combining the light reflected from the surface of the first antireflective film and the light reflected from the surface of the second antireflective film together has flat wavelength dispersion within the range of visible light.

Tabular member and structure with observation port

An anodized layer formation method of an embodiment of the present invention includes the step a of providing an aluminum film which is formed on a first principal surface of a support and the step b of anodizing a surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions. In the step a, a second principal surface of the support which is opposite to the first principal surface is provided with a low heat conduction member that has a predetermined pattern. According to an embodiment of the present invention, a porous alumina layer can be formed which includes regions of different minute structures in the predetermined pattern.

Method for forming anodized layer, method for producing mold and method for producing antireflective film

An antireflection film is provided in which a light scattering property is suppressed. The antireflection film includes, on a surface thereof, a moth-eye structure including a plurality of convex portions such that a width between vertices of adjacent convex portions is no greater than a wavelength of visible light.

Growing community of inventors

Osaka, Japan

Akinobu Isurugi